Samsung Electronics Co., Ltd.

Kap-Soo Lee

Dong-Hoon Han

Keun-Young Lee

Doo-Won Kang

Hong-Taek Lim

Hyun-Jong Lee

Sun-Cheul Kim

Jeong-Woo Hyun

In a substrate processing method, a cleaning process is performed at a first temperature to remove a portion of a cumulative layer that is deposited within a chamber by deposition processes (step 1). The deposition processes are performed at the first temperature on a plurality of substrates within the chamber respectively (step 2). The step 1 and the step 2 are performed alternately and repeatedly.

Substrate processing methods

CVD metallization processes and CVD apparatus used therein are provided. The processes include forming a barrier metal layer on a semiconductor substrate and cooling the semiconductor substrate having the barrier metal layer without breaking vacuum. An additional metal layer may be formed on the cooled barrier metal layer. The in-situ cooling process is preferably performed inside a cooling chamber installed between first and second transfer chambers, which are separated from each other. The barrier metal layer may be formed inside a CVD process chamber attached to the first transfer chamber, and the additional metal layer may be formed inside another CVD process chamber attached to the second transfer chamber.

Chemical vapor deposition metallization processes and chemical vapor deposition apparatus used therein

This invention provides an information transmitting system using television luminance signal, including a data detecting stage for detecting data according to the change of amplitude of a luminance signal by comparing the level of the luminance signal averaged in one field of one frame with that of the luminance signal in another field after separating and averaging the luminance signal of television signal, and a data processing stage for processing the data extracted by said data detecting stage. By carrying out the character information transmission, easy data-receiving without an additional receiving system may be attained and applied to the conventional TV at low price by virtue of the simple circuit composition may be possible according to the present invention.

Information transmitting system using television luminance signal

Growing community of inventors

Suwon-si, South Korea

Kap-Soo Lee