Mitsubishi Denki Kabushiki Kaisha

Kaoru Yamana

Nobuyoshi Hattori

Yoko Miyazaki

Tomoki Tamada

Kyoko Asahina

A monitor wafer is processed by a processing apparatus, and thereafter, it is subjected to an inspection in a foreign object inspection apparatus in accordance with an inspection recipe. A measured result obtained by the inspection is compiled and analyzed in a data management system. Generally, a monitor wafer is not assigned a rot name or a wafer name, however, the measured result is assigned an identification name for identifying plural processing apparatuses from one another, and is stored in a database as storage data.

Inspection analyzing apparatus and semiconductor device

A quality management system (S,) comprises a data processing unit (,), a processed-data judgment unit (,) receiving an output from the data processing unit (,), a sampling unit (,) receiving an output from the processed-data judgment unit (,), a file making unit (,) receiving an output from the sampling unit (,), a data processing unit (,) receiving an output from an observation unit (,) and a processed-data judgment unit (,) receiving an output from the data processing unit (,). The system (S,) having this constitution allows reduction in labor and time from finding of a defect to recognition of occurrence of abnormal condition and improvement in accuracy of fatality rate of the defect.

Growing community of inventors

Hyogo, Japan

Kaoru Yamana