Nikon Corporation

Kaoru Ohmori

Yoshiaki Kohama

A charged particle electron microscope comprises: a sample chamber to which a gas used for gas amplification is supplied; a charged particle irradiation means for irradiating a sample set in the sample chamber with a charged particle beam; at least one first electrode member provided inside the sample chamber to which a first voltage is applied; at least one second electrode member provided inside the sample chamber to which a second voltage different from the first voltage is applied; a high voltage power source control means for controlling the first and the second voltages; and a synthesizer for synthesizing a current signal obtained from the first electrode member and a current signal obtained from the second electrode member, wherein the sample is observed by using a synthetic signal output from the synthesizer as a picture signal.

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Kawasaki, Japan

Kaoru Ohmori