Mitutoyo Corporation

Kaoru Miyata

Kazuhiko Kawasaki

Hisayoshi Sakai

Hiroki Masuda

A three-dimensional geometry measurement apparatus including: a preliminary measurement part that creates a plurality of pieces of preliminary measurement data indicating three-dimensional coordinates of a reference point on a reference instrument; a reference data creation part that creates reference data; a calculation part that calculates a correction value on the basis of the reference data and the preliminary measurement data which does not match the reference data; a target measuring part that creates target measurement data indicating results of measuring a measurement point of the object to be measured; a correction part that corrects the target measurement data in the measurement system corresponding to the preliminary measurement data that does not match the reference data, on the basis of the correction value; and a geometry identification part that identifies a geometry of the object to be measured using the corrected target measurement data.

Three-dimensional geometry measurement apparatus and three-dimensional geometry measurement method

A three-dimensional geometry measurement apparatus including: a relationship identification part that identifies a combination of a first imaging pixel and a projection pixel of a projection image; a determination part that determines, for the combination of the first imaging pixel and the projection pixel, whether or not the combination includes a defective pixel on the basis of a distance between (i) a second imaging pixel corresponding to the same projection coordinate as a projection coordinate corresponding to the first imaging pixel and (ii) a second imaging pixel corresponding to the projection coordinate of the projection pixel and located on an epipolar line of a second captured image corresponding to the projection coordinate; and a geometry measurement part that measures a geometry of an object to be measured using at least one of the first imaging pixel excluding the defective pixel or the second imaging pixel excluding the defective pixel.

A three-dimensional geometry measurement apparatus including a virtual coordinate identification part that identifies coordinates of a virtual captured pixel corresponding to a feature point in an image plane of a capturing device by virtually projecting the feature point on a reference instrument onto the image plane: correction part that generates correction information for correcting coordinates of the measurement-target captured pixel included in a measurement-target captured image; and a geometry identification part that corrects coordinates of a plurality of the measurement-target captured pixels included in the measurement-target captured image generated by capturing an object to be measured with the capturing device on the basis of geometric property information and the correction information, and identifies a geometry of the object to be measured on the basis of measurement three-dimensional coordinates to be calculated based on the coordinates of the measurement-target captured pixels.

A three-dimensional geometry measurement apparatus includes: a relationship identification part that identifies a combination of a first imaging pixel and a second imaging pixel corresponding to the same projection coordinate; a determination part that determines, whether or not at least one of the first imaging pixel or the second imaging pixel is a defective pixel on the basis of a distance between a projection pixel of the projection image; and a geometry measurement part that measures a geometry of an object to be measured using the first imaging pixel or the second imaging pixel corresponding to the combination, for which the first imaging pixel and the second imaging pixel that are determined to be not the defective pixel.

A three-dimensional geometry measurement apparatus includes: a projection part that projects a projection image onto an object to be measured; an image capturing part that generates a captured image by capturing the object to be measured on which the projection image is projected; a relationship identification part that identifies a projection pixel position having correspondence with a captured pixel position; and a defective pixel determination part that determines whether the pixel at the captured pixel position is a defective pixel on the basis of a positional relationship between a projection light beam starting from the projection part and passing through the pixel at the projection pixel position and a captured light beam starting from the image capturing part and passing through the pixel at the captured pixel position having correspondence.

A three-dimensional (3D) geometry measurement apparatus includes a projection part, a capturing part that generates a captured image of an object to be measured to which a projection image is projected, an analyzing part that obtains correspondences between projection pixel positions that are pixel positions of the projection image and captured pixel positions that are pixel positions of the captured image, a line identification part that identifies a first epipolar line of the capturing part corresponding to the captured pixel positions or a second epipolar line of the projection part corresponding to the projection pixel positions, a defective pixel detection part that detects defective pixels based on a positional relationship between the projection pixel positions and the first epipolar line or a positional relationship between the projection pixel positions and the second epipolar line, and a geometry identification part.

The geometry measurement apparatus includes: an image acquisition part that acquires a plurality of captured images generated by imaging an object to be measured, onto which a plurality of respectively different projection patterns are sequentially projected; a quantization part that generates a quantization value of a luminance value for each pixel in the plurality of captured images by comparing the luminance value with a predetermined reference value; a selection part that selects, based on the relationship between the reference value and the luminance value for a plurality of pixels having the same coordinates in the plurality of captured images, a quantization value to be used for identifying the geometry of the object to be measured, from among a plurality of quantization values corresponding to the plurality of captured images; and a geometry identification part that identifies the geometry of the object to be measured based on the quantization value selected by the selection part.

Geometry measurement system, geometry measurement apparatus, and geometry measurement method

A laser source device includes a laser source element configured to emit a laser beam, an optical element disposed downstream of the laser source element, and a return-light-receiving surface at a position shifted in a direction intersecting an active layer of the laser source element. The optical element is tilted with respect to an optical axis of the laser beam so that a return light in a form of a laser beam reflected by the optical element is incident on the return-light-receiving surface.

Laser source device and adjustment method thereof

The oscillation wavelength of a variable wavelength laser is measured by using an optical comb, and a feedback control is performed, whereby laser beams of plural predetermined wavelengths are obtained, or a variable wavelength laser is caused to oscillate at plural arbitrary wavelengths to obtain plural distance measurement values. The wavelengths (frequencies) of laser beams when the respective distance measurement values are obtained are measured by the optical comb, and used in calculation of the geometric distance. Plural lasers are used, and the geometric distance is obtained while the wavelengths of laser beams oscillated from the lasers are measured by the optical comb.

Lightwave interferometric distance measuring method and apparatus using an optical comb

A laser interferometric measuring instrument includes: a light source that emits a laser beam of 1064 nm and another laser beam of 532 nm; a polarizing beam splitter; a dichroic mirror that splits a long-wavelength laser beam provided in a measurement optical path; a long-wavelength corner cube that reflects the split laser beam; a measurement corner cube that is displaceable along the measurement optical path; a reference corner cube that is displaceable along a reference optical path; a optical path changing unit that changes an optical path length of the long-wavelength laser beam; a phase detector that outputs interference signals; a sum signal computer that calculates a sum signal; a displacement controller that displaces the reference corner cube so as not to change a phase of the sum signal; a reference displacement detector that detects a displacement of the reference corner cube; and a measurement displacement computer that calculates a displacement of the measurement corner cube.

Displacement measuring instrument and displacement measuring method

A laser frequency stabilizing device comprises a laser light producer operative to produce and emit a laser light containing a first and a second longitudinal mode light having different wavelengths; a spectrometer operative to spectrally decompose the laser light into the first longitudinal mode light and the second longitudinal mode light; a first detector operative to detect the light output signal from a absorption cell; a second and third detector operative to detect the signal intensity of the first and second longitudinal mode light; an actuator operative to change the resonant cavity length; a first drive controller operative to detect the saturated absorption signal from the light output signal detected at the first detector and control driving the actuator based on the saturated absorption signal; a second drive controller operative to control driving the actuator such that the signal intensity of the first longitudinal mode light detected at the second detector and the signal intensity of the second longitudinal mode light detected at the third detector have a ratio of a certain value; and a switcher operative to switch the control of the detector between the control by the first drive controller and the control by the second drive controller.

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Ibaraki, Japan

Kaoru Miyata