Mitutoyo Corporation

Kaoru Matsuki

Kazuhiko Hidaka

Kiyokazu Okamoto

Masanori Arai

A surface profile measuring instrument for measuring a surface profile of a workpiece has: a probe having a stylus provided with a measuring portion for measuring a surface of a workpiece at a tip end thereof and a detector for outputting a detection signal which varies depending on a measurement condition between the surface of the workpiece and the measuring portion; a scanning mechanism for relatively moving the measuring portion along the surface of the workpiece; a memory () that stores a position information of the contact portion when the detection signal reaches a predetermined reference signal value; a vibration inclination angle calculator () that calculates a response variation factor (vibration inclination angle &#x3b8;) that applies variation to the detection signal from the surface of the workpiece; and a profile processor () that corrects the position information to obtain an actual profile of the surface of the workpiece using the response variation factor.

Surface profile measuring instrument and surface profile measuring method

A stylus structure () integrally incorporating a stylus (), a vibrator (), a detector (), a first secondary magnetic circuit () and a second primary magnetic circuit (), and a stylus support () integrally incorporating a first primary magnetic circuit () and a second secondary magnetic circuit () are mutually fittable, thereby achieving signal transmission by the respective magnetic circuits using no electrical contact.

Vibration detecting system of resilient body and vibrating contact detection probe

A stylus is mounted directly on detector and the detector is mounted directly on a holder . Thus, an vibration-type contact detection sensor is formed in a state in which the holder and the stylus are placed out of contact with each other and the stylus and the detector are placed in contact with each other. Therefore, attenuation of vibration and status change of the stylus by the holder can be circumvented and vibration and status change of the stylus can be propagated directly to the detector , so that the detector can detect vibration and status change of the stylus with high sensitivity, and contact with a workpiece can be detected with high sensitivity.

Vibration-type contact detection sensor

A movement control mechanism of contact-type vibrating probe is provided, where the contact-type vibrating probe can be used as a probe for profiling measurement and continuous measurement and configuration of a workpiece can be measured with high accuracy. The movement control mechanism for controlling movement of a support body ( ) which moves a contact-type vibrating probe ( ) having high detection accuracy includes a vibrator for vibrating the stylus in an axial direction, a detector ( ) for detecting a vibration of the stylus by the vibrator, second vibrator for vibrating the stylus in a direction approximately parallel to an end surface of the workpiece, and a controller ( ) for controlling movement of the support body ( ) so that change in state quantity of a detection signal detected by the detector is constant.

Movement control mechanism of contact-type vibrating probe

A contact location detecting mechanism (,) of a touch signal probe (,) includes a rotary motion generator (,) for scanningly moving a stylus (,) on a plane (A), a phase value detector (,) for detecting a phase value (&thgr;) indicating a rotation position of the scanning rotary motion, and a contact location detector (,for detecting a contact location of a contact portion (,A) based on a detection signal value (V) detected by the detector (,B) and the phase value (&thgr;). Since the contact location of the contact portion (,A) can be detected by the contact location detector (,), the touch signal probe (,) can be used for a profiling measurement and continuous measurement of a workpiece.

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Tsukuba, Japan

Kaoru Matsuki