Rion Company Ltd.

Kioxia Corporation

National Institute of Advanced Industrial Science and Technology

Kaoru Kondo

Takuya Tabuchi

Kazuna Bando

Hidekazu Hayashi

Haruhisa Kato

Yusuke Matsuura

Hiroshi Tomita

Sota Kondo

Akira Suzuki

Hiroshi Sugawara

Eishi Shiobara

Masahiko Tatsumi

Kouki Ogura

Takashi Futatsuki

Ayako Nakamura

Norihiro Takasaki

Masumi Hino

Yoshifumi Bandou

Naoki Tsuda

Junichi Watanabei

Kenyou Miyata

Provided is a particle measurement device in which irradiation light emitted by a light source is expanded by an expander in a shape satisfying the requirements of a diffractive optical element, converted into parallel light, and made to enter the diffractive optical element. The diffractive optical element shapes the irradiation light entering therein into a flat top beam in which the cross section in the focal position thereof has an elongate rectangle shape. The intensity distribution of light can be made substantially uniform in a detection area formed by the shaped irradiation light.

Particle measuring device

For an easy calibration using calibration particles, provided is a measuring device to capture images of target objects. An image analyzer acquires multiple images obtained at a predetermined time interval, (a) specifies the mean-square displacement of a bright point of a calibration particle based on the displacement of the bright point of the calibration particle in the multiple images in a calibration mode, and (b) specifies the mean-square displacement of a bright point of the target particle based on the displacement of the bright point of the target particle in the multiple images in a measurement mode. A particle size analyzer (c) derives the particle size of the target particle from the mean-square displacement of the bright point of the target particle based on the mean-square displacement of the bright point of the calibration particle and the particle size of the calibration particle in an analysis mode.

Particle measuring device, calibration method, and measuring device

According to one embodiment, a particle measuring method is disclosed. The method includes irradiating a detection liquid with light. The detection liquid contains methyl salicylate. The method further includes converting scattered light from the detection liquid into an electric signal by using photoelectric conversion after irradiating the detection liquid with the light. The method further includes performing a particle measurement on the detection liquid by using the electric signal.

Particle measuring method and detection liquid

Provided is a particle measuring device and a particle measuring method for measuring a particle size with favorable accuracy. A flow cell () includes a flow passage () of sample fluid. An irradiation optical system () irradiates, with light from a light source (), the sample fluid in the flow passage (). An imaging unit () captures, from an extension direction of the flow passage (), an image of scattered light from the particle in a detection region in the flow passage (), the light passing through the detection region. A particle size specifying unit specifies a movement amount of the particle in a two-dimensional direction by Brownian motion based on multiple still images of a particle image captured at a predetermined frame rate by the imaging unit (), thereby specifying the particle size of the particle from the movement amount in the two-dimensional direction.

Particle measuring device and particle measuring method

A flow cellis provided with a flow channelwhich has rounded cornersin section. A measuring sample under high pressure is introduced into the flow channelformed in the flow celland particles existing in the measuring sample are measured. The measuring sample is in a liquid phase, a gaseous phase or a super critical phase above 1 MPa.

Flow cell, flow cell manufacturing method and particle measurement instrument

Apparatus for producing a polishing solution composed of pure water and abrasive grains, the apparatus including a preparation tank to prepare a polishing solution containing abrasive grains at a predetermined concentration, by mixing an abrasive grain-containing slurry and pure water, and a circulation device for circulating the thus prepared polishing solution to keep the solution in a suspended state. The circulation device includes a circulation conduit and a flow-controllable bypass conduit fluidly associated with the circulation conduit providing a constant flow rate and having a light-extinction type particle detector for monitoring the polishing solution so as to detect large abrasive grains having a particle size not less than a predetermined value and measure the number of the large abrasive grains.

Apparatus for producing polishing solution and apparatus for feeding the same

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Tokyo, Japan

Kaoru Kondo