Mitsubishi Kinzoku Kabushiki Kaisha

Sigmatech Co., Ltd.

Kaoru Goto

Hideo Negishi

Sueji Takaya

An apparatus for inspecting an internal circuit of a semiconductor device is provided, wherein an inspection table having an inspection equipment such as a microscope, a positioner or the like mounted thereon is constructed into a vibration-proof structure. On a frame surrounding a tester is horizontally supported an inspection table through air spring structures arranged on four corners of the frame, so that vibration or shock produced from a floor or the tester may be effectively absorbed by the air spring structures, to thereby be prevented from adversely affecting a semiconductor device to be inspected. Also, the semiconductor device is set on a socket of a socket-equipped board arranged above the tester in a manner to be close proximity to the tester, so that a substantially true signal may be obtained.

Apparatus for inspecting internal circuit of semiconductor device

A drill bit comprises a body having a shank portion and an end face at its forward end. The drill bit body has at the forward end a cutting means having at least one cutting edge provided on the end face. The cutting edge is spaced from the axis of rotation of the body. The body has a rake surface which terminates in the cutting edge and extends along the axis of rotation.

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Tokyo, Japan

Kaoru Goto