Nagano Keiki Co., Ltd.

Denso Corporation

Kaori Miyashita

Eiji Takeda

Naoki Yoshida

Inao Toyoda

Hiroshi Kodama

Yukihiko Hata

Kenichi Yokoyama

Nobuaki Yamada

Yoshihiro Tomomatsu

Hisayuki Takeuchi

Naohisa Niimi

Yusuke Midorikawa

Shinya Matsumura

Yuuji Nagai

Yasushi Yanagisawa

Yasutake Ura

Yukihiro Kamada

Kouji Asano

Shirou Kamanaru

Masao Takahashi

A pressure sensor has a stem in which a pressure introduction hole into which a pressure medium is introduced and a diaphragm deformable according to the pressure of the pressure medium are formed, and a strain detecting element which is arranged on the diaphragm via an insulating film and being configured to output a detection signal according to the deformation of the diaphragm. The strain detecting element is configured to have a portion made of polysilicon. A low doping layer having a higher electrical resistivity than polysilicon and a higher crystallinity than the insulating film is arranged between the insulating film and the strain detecting element.

Pressure sensor

A detector provided on a flat portion of a diaphragm includes a plurality of strain gauges, resistor element connectors connecting adjacent ones of the strain gauges, and an electric conductor covering a part of the resistor element connectors. First linear portions and second linear portions of the resistor element connectors exposed from the electric conductor are orthogonal to the edges of the electric conductor extending across the first linear portions and the second linear portions. Even when a pattern of the resistor element connector and a pattern of electric conductor are misaligned in X direction or in Y direction, an area of the resistor element connector exposed from the electric conductor does not change.

Sensor module and method for producing sensor module

A detector is provided by coating a fluid conductive material on a flat portion of a diaphragm. The detector includes: a resistor element; resistor element electrodes, which are overlapped and connected with mutually opposed parts of the resistor element; and a linear conductor connected with the resistor element electrodes. The resistor element electrodes each include: a linear portion having a linear inner side facing an inner side of paired one of the resistor element electrodes; and peripheral portions defined at both ends of the linear portion, at least one of the peripheral portions being connected with the linear conductor. All of the linear portions are arranged so that inner sides are arranged mutually in parallel. The resistor element is connected with the linear portion. The peripheral portions are exposed without being connected with the resistor element.

Growing community of inventors

Tokyo, Japan

Kaori Miyashita