Hitachi, Ltd.

Kanji Kinameri

Chusuke Munakata

Yoshitoshi Ito

Shigeharu Kimura

Yuzo Taniguchi

Hiroto Nagatomo

Kyo Suda

Shinobu Hase

Mikihito Saito

The scanning photon microscope according to this invention relates the phase of the ac photovoltage or photocurrent signal to the hue of a color image and the amplitude of the signal to the brightness of the image in representing the signal distribution in the specimen in the form of a color image, in order to make a clear distinction between the amplitude and phase of the ac photovoltage or photocurrent induced in the specimen when irradiated with a photon beam, thus permitting detailed and multilateral analysis of the specimen's characteristics.

Scanning photon microscope for simulataneously displaying both the

A pattern defect inspection apparatus detects presence or absence of a defect in a pattern formed on a semiconductor wafer by scanning the pattern normally to the surface thereof by a coherent light beam of a predetermined spot size, detecting reflected diffraction lights generated thereby and processing the detected lights. It comprises an abnormal direction signal detector including photo-detectors having wide light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from a normal pattern do not normally reach, a normal pattern detector including photo-detectors having large light receiving areas arranged in a plurality of spatial areas which the reflected diffraction lights from the normal pattern reach, and a defect discriminator for determining if the abnormal direction signals are due to a true defect or not in accordance with the signals from the abnormal direction signal detector and the normal pattern detector.

Pattern defect inspection apparatus

The present invention relates to viewing a three-dimensional internal structure of a specimen. According to the invention, it is possible to observe the internal structure of a particular cross section of a specimen as clearly differentiated from the other cross sections. The characteristic features of the invention lie in that a plurality of light beams passing through different portions inside the specimen are used, and a correlation among the measurements of transmittance of the plurality of light beams is determined.

Three-dimensional structure viewer and method of viewing

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Nishitama, Japan

Kanji Kinameri