Zhongke Jingyuan Electron Limited

Kangkang Yang

Yan Zhao

Zhaoli Zhang

Weimin Ma

Methods, apparatuses, and systems for image-based abnormality detection for periodic patterns are provided. The method includes receiving an image pattern T determined from an inspection image, wherein T comprises multiple periodic segments along a spatial direction; determining, by a processor, a first reference pattern R1 by rearranging the multiple periodic segments of T in a first manner and a second reference pattern R2 by rearranging the multiple periodic segments of T in a second manner; determining whether an abnormality exists in T by comparing a part of T with a part of R1 and a part of R2; and determining that the abnormality exists in T based on a determination that the part of T is different from the part of R1 and the part of R2.

Growing community of inventors

Beijing, China

Kangkang Yang