Microsystems, Inc.

Kang Yong Lee

Dae Young Lee

Sang Kug Chung

Jeong Min Lee

Dae Geun Kim

Self-cleaning device and method using electrical oscillation and mechanical oscillation are disclosed. The self-cleaning device comprises at least one first electrode disposed on a solid material layer, a first dielectric layer disposed on the first electrode, a hydrophobic layer disposed on the first dielectric layer and at least one mechanical oscillation unit. Here, electrical oscillation for oscillating a droplet in a horizontal direction is generated by applying a first electric signal to the first electrode, thereby merging the droplets formed on the hydrophobic layer, and the mechanical oscillation unit moves the merged droplets in a specific direction or atomizes the merged droplets to remove the merged droplets by generating mechanical oscillation for oscillating the droplet in a vertical direction.

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Yongin-si, South Korea

Kang Yong Lee