Samsung Electronics Co., Ltd.

Kang-Sup Roh

Eun-Jung Lee

Seongjun Seo

Wookhyoung Lee

Jun-seok Kim

Yongin Cho

Joong-ho Yoon

Tackyung Kim

Youngmo Ku

Disclosed is a semiconductor device comprising a substrate including a cell array region and a connection region, an electrode structure extending in a first direction on the substrate and including vertically stacked electrodes having pad sections arranged stepwise on the connection region, a first contact plug connected to a first one of the pad sections, a pair of first vertical structures that penetrate the first one of the pad sections and are spaced apart from each other in a first direction by a first distance, a second contact plug connected to a second one of the pad section and having a vertical length that is greater than that of the first contact plug, and a pair of second vertical structures that penetrate the second one of the pad sections and are spaced apart from each other in the first direction by a second distance that is greater than the first distance.

Semiconductor device and electronic system including the same

An interconnection structure for a semiconductor device may include lower interconnection patterns disposed in a checker board shape and upper interconnection patterns disposed in a checker board shape and connecting two adjacent lower interconnection patterns to each other.

Semiconductor devices having lower and upper interconnection structures that exhibit reduced coupling

Growing community of inventors

Seoul, South Korea

Kang-Sup Roh