Boe Technology Group Co., Ltd.

Chengdu Boe Optoelectronics Technology Co., Ltd.

Kang Luo

Chenliang Liu

Rujian Li

Yongyi Fu

Yin Xie

Yongzhou Ling

Yu Zhang

Fei Fei Li

Zailong Mo

Hao Jing

Da Zhou

Jianbo Yang

Zubin Lv

Xuewei Wang

Donghua Jiang

Chao Tan

Jingshuai Wang

Yayu Wang

Xuefeng Lv

Dongwoo Kang

The disclosure discloses an ion injecting device, and an ion injecting method thereof, where the ion injecting device is modified by adding a vacant baffle between a process chamber and an analyzing magnet. Moreover the vacant baffle is closed before an engineer opens the process chamber for cleaning, so that the process chamber is separated from the analyzing magnet, thus maintaining a vacuum environment in the analyzing magnet. Subsequently only a vacuum environment in the process chamber will be created again.

Ion injecting device using vacant baffle and faraday cups, and ion injecting method thereof, for detecting content of suspending particles

The present disclosure relates to an ion implantation amount adjustment device that includes: an adjuster configured to turn on or off an ion outlet of the ion implantation apparatus; and an actuator configured to control movement of the adjuster to adjust an opening degree of the ion outlet.

Ion implantation amount adjustment device and method, ion implantation apparatus and determination method

A bearing device and an ion implantation device are provided. The bearing device includes a bearing table configured to bear a substrate, and a plurality of supporting components configured to support the substrate, each supporting component is movably arranged on the bearing table, to support the substrate at an adjustable position.

Bearing device and ion implantation device

An excimer laser generator and an excimer laser annealing equipment are disclosed to improve the convenience of window replacement, improve the replacement efficiency and reduce the gas waste. The excimer laser generator includes a reflector, an active medium cavity and an output mirror arranged in sequence. The active medium cavity has a first opening facing the reflector and a second opening facing the output mirror. The excimer laser generator further includes two replacement units respectively arranged between the first opening and the reflector, and between the second opening and the output mirror. Each of the replacement units includes a support plate and a driving component. The support plate is provided with a plurality of windows, and the driving component is adapted for driving the support plate so that one of the plurality of windows seals a corresponding opening.

Excimer laser generator and excimer laser annealing equipment

Growing community of inventors

Beijing, China

Kang Luo