Magic Leap, Inc.

Molecular Imprints, Inc.

Canon Kabushiki Kaisha

Kang Luo

Vikramjit Singh

Frank Y Xu

Shuqiang Yang

Michael Nevin Miller

Nai-Wen Pi

Xiaopei Deng

Samarth Bhargava

Kevin Messer

Michael Anthony Klug

Jeffrey Dean Schmulen

Marlon Edward Menezes

Victor Kai Liu

Roy Matthew Patterson

Charles Scott Carden

Robert D TeKolste

Michal Beau Dennison Vaughn

Satish Sadam

Matthew S Shafran

Christophe Peroz

Mauro Melli

Neal Paul Ricks

Christopher John Fleckenstein

Ryan Christiansen

Qizhen Xue

Matthew Grant Dixon

Byung-Jin Choi

William Hudson Welch

Yoshikazu Miyajima

Anshuman Cherala

David Carl Jurbergs

Xiaoming Lu

Zhengmao Ye

Thomas Mercier

Nobuto Kawahara

Zongxing Wang

Huihang Dong

Xiao Li

Tasha Amit Mangaldas

Kevin R Curtis

Pierre St Hilaire

Robert Dale Tekolste

Jason A Schaefer

Evgeni Poliakov

Melanie Maputol West

Joseph Michael Imhof

Kangkang Wang

Jeremy Lee Sevier

Brett William Best

Kevin Richard Curtis

Recesses are formed on a front side and a rear side of a waveguide. A solid porogen material is spun onto the front side and the rear side and fills the recesses. First front and rear cap layers are then formed on raised formations of the waveguide and on the solid porogen material. The entire structure is then heated and the solid porogen material decomposes to a porogen gas. The first front and rear cap layers are porous to allow the porogen gas to escape and air to enter into the recesses. The air maximizes a difference in refractive indices between the high-index transparent material of the waveguide and the air to promote reflection in the waveguide from interfaces between the waveguide and the air.

Air pocket structures for promoting total internal reflection in a waveguide

Waveguides comprising materials with refractive index greater than or equal to 1.8 and methods of patterning waveguides are disclosed. Patterned waveguides comprising materials with refractive index greater than or equal to 1.8 can be incorporated in display devices, such as, for example wearable display devices to project virtual images to a viewer. A waveguide may be transparent and may comprise a substrate comprising a first material having a first refractive index greater than about 2.0. Diffractive features may be formed, on the substrate, of a second material having a second refractive index that is lower than the first refractive index. A third material may be disposed over the diffractive features and may have a third refractive index that is higher than the second refractive index.

Waveguides with high index materials and methods of fabrication thereof

Very high refractive index (n>2.2) lightguide substrates enable the production of 70° field of view eyepieces with all three color primaries in a single eyepiece layer. Disclosed herein are viewing optics assembly architectures that make use of such eyepieces to reduce size and cost, simplifying manufacturing and assembly, and better-accommodating novel microdisplay designs.

Very high index eyepiece substrate-based viewing optics assembly architectures

Methods and systems for manufacturing an optical waveguide include depositing an adhesion promoting layer on a substrate. Multiple curable resist droplets are dispensed on the adhesion promoting layer. The adhesion promoting layer is disposed between and contacts the substrate and the curable resist droplets. The curable resist droplets define an optical eyepiece layer such that a zero residual layer thickness (RLT) region of the optical eyepiece layer is free of the curable resist droplets. The optical eyepiece layer is incised from the substrate to form the optical waveguide.

Eyepiece assembly adhesion using a zero residual layer region

Blazed diffraction gratings provide optical elements in head-mounted display systems to, e.g., incouple light into or out-couple light out of a waveguide. These blazed diffraction gratings may be configured to have reduced polarization sensitivity. Such gratings may, for example, incouple or outcouple light of different polarizations with similar level of efficiency. The blazed diffraction gratings and waveguides may be formed in a high refractive index substrate such as lithium niobate. In some implementations, the blazed diffraction gratings may include diffractive features having a feature height of 40 nm to 120 nm, for example, 80 nm. The diffractive features may be etched into the high index substrate, e.g., lithium niobate.

Display device having diffraction gratings with reduced polarization sensitivity

A method of fabricating a blazed diffraction grating comprises providing a master template substrate and imprinting periodically repeating lines on the master template substrate in a plurality of master template regions. In some embodiments, the periodically repeating lines in different ones of the master template regions extend in different directions. The method additionally comprises using at least one of the master template regions as a master template to imprint at least one blazed diffraction grating pattern on a grating substrate. In some embodiments, the method further comprises coating the periodically repeating lines with a material having a greater hardness than the material that forms the lines.

Method of fabricating diffraction gratings

Systems and methods for managing multi-objective alignments in imprinting (e.g., single-sided or double-sided) are provided. An example system includes rollers for moving a template roll, a stage for holding a substrate, a dispenser for dispensing resist on the substrate, a light source for curing the resist to form an imprint on the substrate when a template of the template roll is pressed into the resist on the substrate, a first inspection system for registering a fiducial mark of the template to determine a template offset, a second inspection system for registering the imprint on the substrate to determine a wafer registration offset between a target location and an actual location of the imprint, and a controller for controlling to move the substrate with the resist below the template based on the template offset, and determine an overlay bias of the imprint on the substrate based on the wafer registration offset.

Managing multi-objective alignments for imprinting

Display devices include waveguides with in-coupling optical elements that mitigate re-bounce of in-coupled light to improve overall in-coupling efficiency and/or uniformity. A waveguide receives light from a light source and/or projection optics and includes an in-coupling optical element that in-couples the received light to propagate by total internal reflection in a propagation direction within the waveguide. Once in-coupled into the waveguide the light may undergo re-bounce, in which the light reflects off a waveguide surface and, after the reflection, strikes the in-coupling optical element. Upon striking the in-coupling optical element, the light may be partially absorbed and/or out-coupled by the optical element, thereby effectively reducing the amount of in-coupled light propagating through the waveguide. The in-coupling optical element can be truncated or have reduced diffraction efficiency along the propagation direction to reduce the occurrence of light loss due to re-bounce of in-coupled light, resulting in less in-coupled light being prematurely out-coupled and/or absorbed during subsequent interactions with the in-coupling optical element.

Diffractive optical elements with mitigation of rebounce-induced light loss and related systems and methods

Diffraction gratings provide optical elements in head-mounted display systems to, e.g., incouple light into or outcouple light out of a waveguide. These diffraction gratings may be configured to have reduced polarization sensitivity. Such gratings may, for example, incouple or outcouple light of different polarizations, or polarized and unpolarized light, with a similar level of efficiency. The diffraction gratings and waveguides may include a transmissive layer and a metal layer. The diffraction grating may comprise a blazed grating.

Display device with diffraction grating having reduced polarization sensitivity

Systems, apparatus, and methods for double-sided imprinting are provided. An example system includes first rollers for moving a first web including a first template having a first imprinting feature, second rollers for moving a second web including a second template having a second imprinting feature, dispensers for dispensing resist, a locating system for locating reference marks on the first and second webs for aligning the first and second templates, a light source for curing the resist, such that a cured first resist has a first imprinted feature corresponding to the first imprinting feature on one side of the substrate and a cured second resist has a second imprinted feature corresponding to the second imprinting feature on the other side of the substrate, and a moving system for feeding in the substrate between the first and second templates and unloading the double-imprinted substrate from the first and second webs.

Double-sided imprinting

Waveguides comprising materials with refractive index greater than or equal to 1.8 and methods of patterning waveguides are disclosed. Patterned waveguides comprising materials with refractive index greater than or equal to 1.8 can be incorporated in display devices, such as, for example wearable display devices to project virtual images to a viewer.

A method of fabricating a blazed diffraction grating comprises providing a master template substrate and imprinting periodically repeating lines on the master template substrate in a plurality of master template regions. The periodically repeating lines in different ones of the master template regions extend in different directions. The method additionally comprises using at least one of the master template regions as a master template to imprint at least one blazed diffraction grating pattern on a grating substrate.

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Austin, TX, United States of America

Kang Luo