Komag Corporation

Lam Research Corporation

Kang Jia

Ronald Allen

Herbert Elliot Litvak

Eugene Yuexing Zhao

Peter S Bae

Michael Edwin Slafter

Stanley M Smith

Michael David Steiman

Christian David Frederickson

Warren C Schroeder

An optical window structure is disclosed. The optical window structure includes a support layer that has a reinforcement layer and a cushioning layer. In addition, the optical windows structure has a polishing pad which is attached to a top surface of the support layer. Furthermore, the optical window structure has an optical window opening and a shaped optical window. The shaped optical window at least partially protrudes into the optical window opening in the support layer and the polishing pad during operation.

Apparatus for accurate endpoint detection in supported polishing pads

A novel colloidal silica slurry including additives for enhancing the removal rate of a metallic workpiece, preventing etch pits, and enhancing smoothness. These additives include HNO.sub.3, H.sub.2 O.sub.2 and Al(NO.sub.3).sub.3. In lieu of colloidal silica, colloidal alumina can be used. The metallic workpiece can be NiP, Ni, Al or other appropriate materials.

Colloidal silica slurry for NiP plated disk polishing

A memory disk having a central opening and planar sides for receiving magnetic media on both of the sides is bounded by a cylindrical outside diameter peripheral edge and chamfered edges extending between each of the planar sides. The peripheral edge is clamped by a disk processing chuck including a disk retainer mount having a central disk support for mounting a circular disk edge bounding the central opening and a mount cylindrical beveled edge receiving an outside diameter chamfered edge of the disk. A ring in the retainer mount includes a multiplicity of spaced radial fingers extending cylindrically around the ring, each finger having a distal end extending to a first position outboard of the disk peripheral edge. The distal ends are moveable inwardly to a second position by an inflatable bladder acting simultaneously against all the fingers, placing the distal end tips into clamping contact with the disk peripheral edge mounted on the retainer mount.

Disk processing chuck

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Fremont, CA, United States of America

Kang Jia