Samsung Electronics Co., Ltd.

Kang-Ill Seo

Byounghak Hong

Inchan Hwang

Seungchan Yun

Seunghyun Song

Gunho Jo

Jason Martineau

Myunggil Kang

Sooyoung Park

Wonhyuk Hong

Jaemyung Choi

Hyoeun Park

Daewon Ha

Hoonseok Seo

Saehan Park

Ki-Il Kim

Jeonghyuk Yim

Jungsu Kim

Myunghoon Jung

WookHyun Kwon

Jaejik Baek

Janggeun Lee

Ki-il Kim

Eunsung Kim

Integrated circuit devices including a bipolar junction transistor (BJT) and/or a P-N junction diode are provided. The integrated circuit devices may include a first stack including first and second semiconductor regions that are spaced apart from each other in a horizontal direction and have a first conductivity type and a plurality of nano-semiconductor layers that are stacked in a vertical direction and are between the first and second semiconductor regions. The plurality of nano-semiconductor layers each have a second conductivity type, and the first semiconductor region may include a side surface facing the plurality of nano-semiconductor layers. The integrated circuit device may also include a vertical semiconductor layer having the second conductivity type and a conductive contact that contacts the plurality of nano-semiconductor layers. The vertical semiconductor layer may contact the side surface of the first semiconductor region and the plurality of nano-semiconductor layers.

Bipolar junction transistors and P-N junction diodes including stacked nano-semiconductor layers

A semiconductor device includes: a substrate; at least one hybrid channel structure formed on the substrate and including at least one 1channel structure extended in 1and 2directions in parallel with an upper surface of the substrate without directly contacting the substrate, and a 2channel structure connected to and intersecting the at least one 1channel structure in a 3direction perpendicular to the 1or 2direction; a gate structure surrounding the hybrid channel structure; and source/drain regions respectively formed at two opposite ends of the at least one hybrid channel structure in the 1direction.

Semiconductor device having hybrid channel structure

Methods of forming an integrated circuit devices may include providing first and second active regions, an isolation layer, and first and second sacrificial stack structures. The first and second sacrificial stack structures may contact the first and second active regions, and the first and second sacrificial stack structures may each include a channel layer and a sacrificial layer. The methods may also include forming an etch stop layer on the isolation layer, replacing portions of the first and second sacrificial stack structures with first and second source/drain regions, forming a front contact including a front contact plug, forming a back-side insulator, and forming a back contact plug in the isolation layer and the back-side insulator. At least one of a portion of the front contact plug and a portion of the back contact plug may be in the etch stop layer.

Integrated circuit devices including backside power rail and methods of forming the same

An integrated circuit includes a first semiconductor device and a second semiconductor device adjacent to the first semiconductor device. Each of the first and second semiconductor devices includes a lower transistor and an upper transistor on the lower transistor, and the upper and lower transistors each include a source region, a drain region, and a channel region extending between the source region and the drain region. The integrated circuit also includes a first dielectric spacer extending along an inner sidewall of the channel region of the upper and/or lower transistor of the first semiconductor device, a second dielectric spacer facing the first dielectric spacer and extending along an inner sidewall of the channel region of the upper and/or lower transistor of the second semiconductor device. The integrated circuit also includes an interconnect contact between the first semiconductor device and the second semiconductor device.

Limited lateral growth of S/D epi by outer dielectric layer in 3-dimensional stacked device

Integrated circuit devices are provided. An integrated circuit device includes a first insulating layer and a metal via that is in the first insulating layer. The integrated circuit device includes a second insulating layer on the first insulating layer. The integrated circuit device includes a conductive material that is between sidewalls of the second insulating layer and on the metal via. Moreover, the integrated circuit device includes a metal line that is on the conductive material and/or the second insulating layer. Related methods of forming integrated circuit devices are also provided.

Integrated circuit devices including metal lines spaced apart from metal vias, and related fabrication methods

Integrated circuit devices including a metal resistor and methods of forming the same are provided. The integrated circuit devices may include a substrate including a first surface and a second surface that is opposite the first surface and is parallel to the first surface, a transistor including a gate electrode, first and second resistor contacts that are spaced apart from each other in a horizontal direction that is parallel to the second surface of the substrate, and a metal resistor. The first surface of the substrate may face the gate electrode. The metal resistor may include a third surface and a fourth surface that is parallel to the third surface and the second surface of the substrate, and the fourth surface of the metal resistor may be closer to the second surface than the first surface and contacts the first and second resistor contacts.

Integrated circuit devices including a metal resistor and methods of forming the same

A CMOS device including a substrate comprising a shallow trench isolation region, an nFET on the substrate above the shallow trench isolation region, and a pFET. The nFET includes a source region, a drain region, a channel region including a series of nanowires extending from the source region to the drain region, and a gate region around the series of nanowires of the channel region. The nanowires include a first series of nanowires in a first column and a second series of nanowires in a second column adjacent to the first column. The pFET includes a source region, a drain region, a channel region extending from the source region to the drain region, and a gate region on the channel region.

Step-stacked nanowire CMOS structure for low power logic device and method of manufacturing the same

Provided is a three-dimensionally (3D) stacked semiconductor chip architecture including a first semiconductor chip including a first wafer, a first front-end-of-line (FEOL) layer provided on a first side of the first wafer, a first middle-of-line (MOL) layer provided on the first FEOL layer, a first back-end-of-line (BEOL) layer provided on the first MOL layer, a first power rail layer provided on a second side of the first wafer, and a second semiconductor chip including a second wafer, a second FEOL layer provided on a first side of the second wafer, a second MOL layer provided on the second FEOL layer, a second BEOL layer provided on the second MOL layer, a second power rail layer provided on a second side of the second wafer, wherein the first power rail layer and the second power rail layer contact each other.

3D stacked chip that shares power rails

Resistance measuring structures for a stacked integrated circuit device are provided. The resistance measuring structures may include a first Complementary Field Effect Transistor (CFET) stack, a second CFET stack, and a conductive connection. The first CFET may include a first upper transistor that includes a first upper drain region and a first lower transistor that is between the substrate and the first upper transistor and includes a first lower drain region. The second CFET may include a second upper transistor that includes a second upper drain region and a second lower transistor that is between the substrate and the second upper transistor and includes a second lower drain region. The conductive connection may electrically connect the first upper drain region and the second upper drain region.

Resistance measuring structures of stacked devices

Resistor structures of stacked devices and methods of forming the same are provided. The, resistor structures may include a substrate, an upper semiconductor layer that may be spaced apart from the substrate in a vertical direction, a lower semiconductor layer that may be between the substrate and the upper semiconductor layer, and first and second resistor contacts that may be spaced apart from each other in a horizontal direction. At least one of the upper semiconductor layer, the lower semiconductor layer, and a portion of the substrate may contact the first and second resistor contacts.

Resistor structures of integrated circuit devices including stacked transistors and methods of forming the same

A multi-stack semiconductor device includes: a substrate; and a plurality of multi-stack transistor structures arranged on the substrate in a channel width direction, wherein the multi-stack transistor structure include at least one lower transistor structure and at least one upper transistor structure stacked above the lower transistor structure, wherein the lower and upper transistor structures include at least one channel layer as a current channel, wherein the lower transistor structures of at least two multi-stack transistor structures have different channel-layer widths.

Size-controllable multi-stack semiconductor device and method of manufacturing the same

Integrated circuit devices and methods of forming the same are provided. The integrated circuit devices may include a static random access memory (SRAM) unit. The SRAM unit may include a first inverter on a substrate and a power distribution network (PDN) structure including a first power rail and a second power rail. The substrate may extend between the first inverter and the PDN structure. The first inverter may include a first upper transistor including a first upper source/drain region, a first lower transistor between the substrate and the first upper transistor and including a first lower source/drain region, a first power contact extending through the substrate and electrically connecting the first upper source/drain region to the first power rail, and a second power contact extending through the substrate and electrically connecting the first lower source/drain region to the second power rail.

Integrated circuit devices including a power distribution network and methods of forming the same

Presented are structures and methods for forming such structures that allow for electrical or diffusion breaks between transistors of one level of a stacked transistor device, without necessarily requiring that a like electrical or diffusion break exists in another level of the stacked transistor device. Also presented, an electrical break between transistor devices may be formed by providing a channel of a first polarity with a false gate comprising a work-function metal of an opposite polarity.

Selective single diffusion/electrical barrier

A multi-stack semiconductor device includes: a substrate; a multi-stack transistor formed on the substrate and including a nanosheet transistor and a fin field-effect transistor (FinFET) above the nanosheet transistor, wherein the nanosheet transistor includes a plurality nanosheet layers surrounded by a lower gate structure except between the nanosheet layers, the FinFET includes at least one fin structure, of which at least top and side surfaces are surrounded by an upper gate structure, and each of the lower and upper gate structures includes: a gate oxide layer formed on the nanosheet layers and the at least one fin structure; and a gate metal pattern formed on the gate oxide layer. At least one of the lower and upper gate structures includes an extra gate (EG) oxide layer formed between the gate oxide layer and the nanosheet layers and/or between the gate oxide layer and the at least one fin structure.

Multi-stack semiconductor device with zebra nanosheet structure

Nanosheet transistor devices are provided. A nanosheet transistor device includes a transistor stack that includes a lower nanosheet transistor having a first nanosheet width and a lower gate width. The transistor stack also includes an upper nanosheet transistor that is on the lower nanosheet transistor and that has a second nanosheet width and an upper gate width that are different from the first nanosheet width and the lower gate width, respectively. Related methods of forming a nanosheet transistor device are also provided.

Growing community of inventors

Albany, NY, United States of America

Kang-Ill Seo