Samsung Display Co., Ltd.

Kang-Il Lee

Yong-Sup Choi

Suk-Won Jung

Cheol-Lae Roh

Jae-Seok Park

Seung-Ho Choi

Chang Mog Jo

Young-Geun Cho

Hyun-Keun Song

Chool-Lae Roh

A method of forming a thin film on a substrate includes arranging the substrate to face a thin film deposition apparatus; and discharging a deposition material via a deposition source of the thin film deposition apparatus onto the substrate; wherein a deposition source nozzle unit of the thin film deposition apparatus is disposed at a side of the deposition source and includes a plurality of deposition source nozzles arranged in a first direction; wherein a patterning slit sheet of the thin film deposition apparatus is disposed to be between the deposition source nozzle unit and the substrate, the patterning slit sheet including a plurality of patterning slits, and wherein each of the patterning slits includes a plurality of sub-slits.

Method of depositing a thin film

A method of depositing a material on a substrate is provided for use in manufacturing electronic and display devices such as semiconductors, liquid crystal displays, and organic light emitting diode displays. A deposition material stored in a first deposition source section is heated to evaporate the deposition material. A second deposition source section, which is separate from the first deposition source section, is cooled. The first deposition source section is cooled, and deposition material stored in a second deposition source section is heated so as to alternately supply evaporated deposition material from the first and second deposition source sections to a feed section. The evaporated deposition material from the feed section is supplied to a nozzle section. A substrate can be provided to receive the evaporated deposition material from the nozzle section. A thin film of deposition material can then be formed on the substrate.

Method of forming thin film from multiple deposition sources

A mask frame assembly for thin film deposition, an organic light-emitting display device using the same, and a method of manufacturing the organic light-emitting display device. The organic light-emitting display device includes a first electrode and a second electrode patterned on a substrate to face each other, and a plurality of organic layers formed between the first and second electrodes. The plurality of organic layers include at least a plurality of stripe-shaped organic layers and a plurality of discontinuous dot-shaped organic layers.

Mask frame assembly for thin film deposition, organic light-emitting display device using the same, and method of manufacturing the organic light-emitting display device

A method of manufacturing an organic thin film pattern, the method including: forming a dummy organic thin film on a substrate; radiating light on the dummy organic thin film pattern the dummy organic thin film; forming a main organic thin film, having a sublimation temperature is higher than that of the dummy organic thin film, on the substrate and the patterned dummy organic thin film; and heating patterned the dummy organic thin film and the main organic thin film, to sublimate the dummy organic thin film and thereby pattern the main organic thin film.

Method of forming organic thin film pattern and method of manufacturing organic light-emitting display device by using the method of forming organic thin film pattern

Growing community of inventors

Yongin, South Korea

Kang-Il Lee