Harbin Institute of Technology

Kang Gu

Jian Liu

Chenguang Liu

Zijie Hua

This application relates to the technical field of confocal microscopy measurement, and provides a dark-field confocal microscopy measurement apparatus and method based on multi-fractional angular momentum demodulation. The apparatus includes a modulated illumination module and a signal collection and demodulation module. The modulated illumination module obtains vortex light with different fractional orders through modulation using vortex phase patterns with different fractional orders, so as to scan a to-be-measured sample. The vortex light with different fractional orders irradiates the to-be-measured sample and is reflected out. The signal collection and demodulation module collects the reflected light and generates dark-field images, and finally performs cross-correlation processing on the dark-field images generated under the vortex light with different fractional orders, to obtain high SNR data.

Dark-field confocal microscopy measurement apparatus and method based on multi-fractional angular momentum demodulation

Provided are a dark-field confocal microscopy measurement apparatus and method. The apparatus includes: a fractional vortex beam module configured to generate first fractional vortex beam and second fractional vortex beam; an optical scanning module configured to scan a sample by using the first fractional vortex beam and the second fractional vortex beam to obtain first signal return light and second signal return light respectively; a dark-field detection module configured to perform dark-field detection on the first signal return light and the second signal return light to obtain a first fractional-order dark-field image and a second fractional-order dark-field image respectively; a differential dark-field scattered image determining module configured to differentiate the first fractional-order dark-field image from the second fractional-order dark-field image to obtain a differential dark-field scattered image; and a defect determining module configured to process the differential dark-field scattered image to obtain a sample defect.

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Harbin City, Heilongjiang Province, China

Kang Gu