Kabushiki Kaisha Kobe Seiko Sho

Kaneo Yamada

Koji Inoue

Shigeto Adachi

Norio Suzuki

Kazuhiko Asada

Yutaka Kawata

Kiyotaka Ishibashi

Hirofumi Fukuyama

Akira Kobayashi

Akio Arai

Yukito Furukawa

Keizo Tokushige

Ken-ichi Inoue

Shigemi Okamoto

Sunao Takahashi

Makoto Kimura

A converged ion beam apparatus wherein a very small beam spot can be formed with a high energy ion beam after passing a reduced route in which a type of the ion beam is classified. The device is incorporated in an apparatus wherein an ion beam from an accelerator is introduced in a spot to a specimen by way of an ion type classifying device, an objective collimator and a beam collector to perform reforming of a surface or an analysis of physical properties and/or composition or the like of a small area of the specimen. The objective collimator is disposed just on the downstream of the accelerator, and an analyzing component for analyzing an ion type and energy of a beam is interposed in a drift space in an object distance between the objective collimator and a quadruple pole magnetic lens. Several components of the apparatus are also improved including the quadruple pole magnetic lens, an objective slit device and a specimen chamber.

Converged ion beam apparatus

An apparatus for uniformly distributing a liquid having dual gaseous and liquid phases for use with a heat exchanger is disclosed. A liquid spreading device of the apparatus includes a main pipe extending along the full length of a header of the apparatus, and a plurality of branch pipes connected to the main pipe and extending perpendicularly to the main pipe just above and along the full width of descending flow entrances of a core of the heat exchanger. Each branch pipe has a plurality of liquid spreading holes perforated in a predetermined spaced relationship at the bottom thereof. Thus, liquid can be distributed from the apparatus substantially uniformly within a deviation of, for example, .+-.10 percent.

Uniform distributor apparatus for a gaseous and liquid phase fluid

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Akashi, Japan

Kaneo Yamada