Hitachi-high-technologies Corporation

Kanehiro Nagao

Hiroyasu Kaga

Motohide Ukiana

A liquid metal ion gunincludes a liquid metal ion sourceand a beam limiting aperture. The liquid metal ion sourceincludes a reservoirand an emitter. The reservoiris made of tungsten (W) and holds liquid metal gallium (Ga). The emitteris made of W. The beam limiting apertureis formed with a liquid metal membermade of Ga placed on a basemade of W, has an openingthat enables an ion beamextracted from the liquid metal ion sourceto pass therethrough, and limits the diameter of the ion beam. The beam limiting aperturehas a groove structurethat causes the liquid metalto gather into a region located around the opening. The lifetime of the beam limiting aperture can be increased, and an emission can be maintained stable for a long time period and reproducibly restored to a stable state.

Growing community of inventors

Hitachinaka, Japan

Kanehiro Nagao