Seiko Epson Corporation

Sony Corporation

Epson Imaging Devices Corporation

Kanechika Kiyose

Chikara Kojima

Tomoaki Nakamura

Hironori Suzuki

Hiroshi Matsuda

Jiro Tsuruno

Tomohide Onogi

Daisuke Nakanishi

Koji Ohashi

Yasunori Onishi

Masayoshi Yamada

Hikaru Iwai

Mitsuru Miyasaka

Mio Sasaki

Ryoki Watanabe

Kazuki Yoshida

Katsuhiro Imai

Nobuaki Hashimoto

Hiromu Miyazawa

Hiroshi Ito

Takahiro Kamijo

Tsukasa Funasaka

Tomohiro Sayama

Yasuyuki Matsumoto

Eiji Osawa

Kogo Endo

Yoshio Arai

Seiji Izuo

Yoji Takahashi

Toshikazu Uchiyama

Satoshi Taguchi

Kennosuke Kakehi

Masahiro Onoda

An ultrasonic sensor includes: a first substrate including an ultrasonic element; a first electrode and a second electrode on the first substrate; a second substrate having a through-hole that penetrates from a first surface facing the first substrate to a second surface; and a gap material that separates the first substrate and the second substrate from each other, in which in a plan view from a +Z direction, the through-hole overlaps with the first electrode and the second electrode, and the gap material surrounds the through-hole, the through-hole has a narrow portion, and a width of the narrow portion is smaller than a width of the through-hole in the first surface, in a direction orthogonal to the +Z direction.

Ultrasonic device

A fluid device includes a flow path through which a fluid flows, and an ultrasonic element that transmits an ultrasonic wave to the fluid to generate a standing wave in the fluid in the flow path along a first direction orthogonal to a flowing direction of the fluid. The ultrasonic element includes a vibrator having a fluid contact surface that comes into contact with the fluid, and a piezoelectric element that is provided at the vibrator and that flexurally vibrates the vibrator in a normal direction of the fluid contact surface. When a thickness of the vibrator in the normal direction is t, a sound velocity of a medium of the fluid is C, an average sound velocity of a longitudinal wave transmitted in the vibrator is C′, a dimension of the flow path in the first direction is L, and a mode order of the standing wave is n, the following expression is satisfied.

Fluid device

An ultrasonic thickness measurement device includes ultrasonic probe including eight or less ultrasonic elements each including a transmission element and a receiving element, the transmission element and the receiving element being an ultrasonic elements, and a controller configured to determine a thickness of target body tissue from tomographic image data of a body of a subject acquired based on a received signal that is received by each of the receiving elements of each of the ultrasonic elements. The controller determines the thickness from the tomographic image data based on each of the received signals that is received by each of the ultrasonic elements.

Ultrasonic thickness measurement device and ultrasonic thickness measurement

A fluid device includes: a flow path through which a fluid flows; and an ultrasonic wave transmitter configured to transmit an ultrasonic wave to generate a standing wave to the fluid in the flow path along a first direction orthogonal to a flowing direction of the fluid. The ultrasonic wave transmitter is in contact with the fluid and faces an antinode region corresponding to any antinode in the standing wave.

A piezoelectric device includes a substrate having opening portions, a vibrating plate provided to overlap with the substrate and having a plurality of vibrating regions overlapping with the opening portions in a plan view as seen from a thickness direction of the substrate, piezoelectric elements provided in the vibrating regions, and bypass wires provided outside of the vibrating regions of the vibrating plate and electrically coupled to the plurality of piezoelectric elements, wherein slits penetrating the bypass wires in the thickness direction are provided in the bypass wires.

Piezoelectric device having plurality of vibrating regions and electronic apparatus

A fluid device includes: a flow path through which a fluid flows; a pressure chamber spaced apart from the flow path in a first direction (Y direction) orthogonal to a flowing direction of the fluid in the flow path; a communication path that is formed along the Y direction and that communicates the flow path with the pressure chamber; and an ultrasonic wave transmitter configured to transmit ultrasonic waves to the fluid in the pressure chamber to generate a standing wave along the Y direction in the flow path.

A fluid device includes: a flow main body including a side wall along a first axis and configured to flow a fluid from an inflow portion provided at one side of the first axis toward an outflow portion provided at the other side of the first axis; a plate provided at the other side of the first axis of the flow main body and having a first surface intersecting the first axis; a standing wall extending along the first axis from the first surface toward the one side of the first axis and having a length along the first axis shorter than the side wall; and an ultrasonic element disposed at an outer side of a collection region of the plate and configured to transmit an ultrasonic wave along the first axis when the standing wall and a region surrounded by the standing wall on the first surface are defined as the collection region.

Provided is an ultrasonic device including a substrate and a vibration plate provided on the substrate and having one or more vibrators configured to generate an ultrasonic wave by vibration. The vibration plate has a movable portion provided with the vibrator and configured to vibrate accompanying with the vibration of the vibrator, and a fixed portion fixed to the substrate. A vibration frequency of a reflected wave based on a wave transmitted from the movable portion and received by the movable portion is outside a vibration frequency band region of the vibrator.

Ultrasonic device and ultrasonic sensor

An ultrasonic device including: an element substrate including a diaphragm, a vibrator provided at the diaphragm, and a first electrode electrically coupled to the vibrator; a protective substrate that is provided at a position facing the element substrate and that includes a second electrode coupled to the first electrode at a position facing the first electrode; a through hole substrate that has a through hole and that faces the element substrate; and a container including a mounting surface on which the protective substrate is disposed, in which the vibrator is provided at a position overlapping the through hole when viewed from a facing direction in which the element substrate and the protective substrate face each other, and is surrounded by the element substrate, the protective substrate, and a jointing member, and the second electrode is provided at an opposite-side surface of the protective substrate from a jointing surface jointed with the mounting surface.

An MEMS device includes: a first member; a second member forming a sealed space with the first member therebetween; and a third member disposed between the first member and the second member and joined to the first member and the second member, in which the third member has lower rigidity than rigidity of the first member and the second member, and the third member is provided with a communication portion that establishes communication between the sealed space and an external space.

MEMs device and electronic device

An ultrasonic sensor includes a vibration plate that includes a vibration portion and is formed of a resin; a wall portion that is provided on the vibration plate, surrounds the vibration portion and is formed of a resin; and a piezoelectric element that is provided in the vibration portion of the vibration plate. Accordingly, the wall portion surrounding the vibration portion can suppress a frequency variation of an ultrasonic wave output from the ultrasonic sensor and can deform the ultrasonic sensor into a shape corresponding to a surface of an object having various shapes.

Ultrasonic sensor, ultrasonic device, and method of manufacturing ultrasonic sensor

A sonic speed measurement device includes a reception array in which a plurality of reception elements which output reception signals in response to reception of an ultrasonic wave are disposed in one direction, a phase difference detection portion that detects a phase difference between the reception signals output from the reception elements adjacent to each other in a case where the plurality of reception elements receive the ultrasonic wave which propagates in a spherical wave shape from a target point, and a sonic speed calculation portion that calculates a sonic speed of the ultrasonic wave on the basis of the phase difference.

Sonic speed measurement device and electronic apparatus

An ultrasonic device includes: a substrate provided with a first opening and a second opening; a support film that is provided on the substrate and blocks the first opening and the second opening; a transmitting piezoelectric film that is provided on the support film at a position which overlaps the first opening when viewed in a thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate; and a receiving piezoelectric film that is provided on the support film at a position which overlaps the second opening when viewed in the thickness direction of the substrate and is interposed between a pair of electrodes in the thickness direction of the substrate. In the thickness direction of the substrate, a thickness dimension of the transmitting piezoelectric film is smaller than a thickness dimension of the receiving piezoelectric film.

Ultrasonic device, ultrasonic module, and ultrasonic measuring apparatus

An ultrasonic device includes an ultrasonic transceiver that transmits an ultrasonic wave to a target at a predetermined interval, and that receives the ultrasonic wave reflected on the target so as to output a reception signal, a signal integration unit that outputs an integrated signal obtained by integrating the reception signals output within a predetermined period, and a position detection unit that detects a position of the target, based on a magnitude relationship between signal intensity of the integrated signal and a predetermined reference value.

Ultrasonic device and ultrasonic measurement method

A sensor unit includes a sensor device, a holder that holds the sensor device and includes a surface maintained at a reference potential, and a case that houses the holder, in which the case includes a mounting surface in contact with a mounting object, and the mounting surface is provided with a communication portion that causes an inside and an outside of the case to communicate with each other, and the holder includes a protrusion that protrudes from the communication portion and comes in contact with the mounting object.

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Matsumoto, Japan

Kanechika Kiyose