Nitto-denko Corporation

Kanako Hida

Ryohei Kakiuchi

Satoru Yamamoto

Shigenori Morita

Provided is a method for manufacturing an organic EL device, including: a vapor deposition step of forming an organic layer over a substrate moving relative to a nozzle by discharging a vaporized organic layer-forming material through the nozzle. The vapor deposition step is performed so that a light emitting region formed of the organic layer and having a width A (mm) in a direction perpendicular to a direction in which the substrate is moving is formed, and so that W&#x2267;A+2&#xd7;h (where h&#x2266;5 mm) is satisfied, where a length of an opening of the nozzle in the direction perpendicular to the direction in which the substrate is moving is denoted by W (mm), and a distance between the opening and the substrate is denoted by h (mm).

Method and apparatus for manufacturing organic EL device

Provided are a method and an apparatus for manufacturing an organic EL device, which makes it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed by deposition over a substrate in the form of a strip, while the substrate is being moved in the longitudinal direction, includes a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in first and second deposition units arranged along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes a plurality of upward deposition steps and a direction changing step.

Method and apparatus for manufacturing organic el device

Provided are a method and an apparatus for manufacturing an organic EL device which enable deposition of a vaporized material from an evaporation source onto a substrate in a desired pattern, while eliminating the need for a conventional strip-shaped shadow mask. A shielding portionis configured to be switchable between a shield position where the shielding portionis arranged between an evaporation sourceand a substrateso as to shield the substrateand a shield release position where the shielding portionis withdrawn from between the evaporation sourceand the substrateso as to release the shielding of the substrate. The shielding portionis switched between the shield position and the shield release position while rotating together with a roller

Provided is a method and an apparatus for manufacturing an organic EL device which make it possible to manufacture organic EL devices capable of suppressing quality degradation. The method for manufacturing an organic EL device, in which constituent layers of an organic EL element are formed over a substrate in the form of a strip by deposition, while the substrate is being moved in the longitudinal direction, includes: a constituent layer-forming step of performing deposition over one surface of the substrate, while the substrate is being moved in the longitudinal direction, sequentially in an upward deposition unit and a lateral deposition unit provided along the moving direction of the substrate by discharging a vaporized material from an evaporation source. The constituent layer-forming step includes an upward deposition step, a laterally deposition step, and a direction changing step.

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Ibaraki, Japan

Kanako Hida