Daikin Industries, Ltd.

Kanako Fukumoto

Tatsuya Ohtsuka

Shingo Nakamura

Yuusuke Etou

Ikuo Yamamoto

Masahiro Higashi

Masahiro Miyahara

Tetsuya Uehara

Masato Naitou

Masaki Fukumori

Provided is a method for producing fluoromethane and 3,3,3-trifluoro-2-(trifluoromethyl)propanoyl fluoride ((CF)CHCOF), which are useful as dry etching gases etc., safely and inexpensively with high purity. According to the method in which 1,1,3,3,3-pentafluoro-2-trifluoromethylpropyl methyl ether is pyrolyzed in a gas phase in the presence of a catalyst, the desired fluoromethane and 3,3,3-trifluoro-2-(trifluoromethyl)propanoyl fluoride can be obtained with high selectivity and high conversion of the starting material by a simple process in which a pyrolysis reaction is performed in a gas phase using the inexpensive starting material.

Method for producing dry etching gas

An object of the present invention is to provide a method for producing methane fluoride that is useful, for example, as a dry etching gas, the method being more suitable for industrial production. To achieve this object, the present invention provides a method including reacting (A) dimethyl sulfate and (B) at least one fluorocompound in a liquid phase, the fluorocompound (B) being at least one compound selected from the group consisting of hydrogen fluoride and hydrofluoric acid salts, or a metal fluoride, wherein when the fluoride compound (B) includes hydrogen fluoride or a hydrofluoric acid salt, the reaction is carried out without a solvent or using a polar solvent as a solvent, and when the fluoride compound (B) is a metal fluoride, the reaction is carried out using water as a solvent.

Method for manufacturing methyl fluoride

A fluorine-containing polymer having (a) a repeating unit derived from a fluorine-containing monomer indicated by the formula CH&#x2550;C(&#x2014;X)&#x2014;C(&#x2550;O)&#x2014;Y&#x2014;Z&#x2014;Rf, (b) a repeating unit derived from a cyclic-hydrocarbon-group-containing acrylate ester monomer indicated by the formula CH&#x2550;CQ&#x2014;C(&#x2550;O)&#x2014;O-Q, and (c) a repeating unit derived from an aliphatic-hydrocarbon-group-containing acrylate ester monomer indicated by the formula CH&#x2550;CQ&#x2014;C(&#x2550;O)&#x2014;O-Q. The fluorine-containing polymer is produced by polymerizing in the presence of one or both of (d) a silicon-containing monomer and a silicon-containing chain transfer agent.

Surface treatment agent

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Osaka, Japan

Kanako Fukumoto