Texas Instruments Corporation

Other

Instruments Incorporated

Kamel Benaissa

Greg Charles Baldwin

Shashank Sureshchandra Ekbote

Amitava Chatterjee

Shaofeng Yu

Chi-Cheong Shen

Vineet Mishra

Song Zhao

Russell Carlton McMullan

Ananth Kamath

Sarah Liu

Abdellatif Bellaouar

Hisashi Shichijo

Vijay Kumar Reddy

David B Spratt

Borna J Obradovic

Samuel Edward Martin

Michael D Aragon

T Krishnaswamy

Russell Carlton Mcmullan

Integrated circuits and manufacturing methods are presented for creating diffusion resistors () in which the diffusion resistor well is spaced from oppositely doped wells to mitigate diffusion resistor well depletion under high biasing so as to provide reduced voltage coefficient of resistivity and increased breakdown voltage for high-voltage applications.

Diffusion resistor with reduced voltage coefficient of resistance and increased breakdown voltage using CMOS wells

Elongated metal contacts with longitudinal axes that lie in a first direction are formed to make electrical connections to elongated source and drain regions with longitudinal axes that lie in the first direction, and elongated metal contacts with longitudinal axes that lie a second direction are formed to make electrical connections to elongated source and drain regions with longitudinal axes that lie the second direction, where the second direction lies orthogonal to the first direction.

MOS transistor structure and method of forming the structure with vertically and horizontally-elongated metal contacts

A method for adding a low TCR resistor to a baseline CMOS manufacturing flow. A method of forming a low TCR resistor in a CMOS manufacturing flow. A method of forming an n-type and a p-type transistor with a low TCR resistor in a CMOS manufacturing flow.

Low temperature coefficient resistor in CMOS flow

An integrated circuit containing a metal gate transistor and a thin polysilicon resistor may be formed by forming a first layer of polysilicon and removed it in an area for the thin polysilicon resistor. A second layer of polysilicon is formed over the first layer of polysilicon and in the area for the thin polysilicon resistor. The thin polysilicon resistor is formed in the second layer of polysilicon and the sacrificial gate is formed in the first layer of polysilicon and the second layer of polysilicon. A PMD layer is formed over the second layer of polysilicon and a top portion of the PMD layer is removed so as to expose the sacrificial gate but not expose the second layer of polysilicon in the thin polysilicon resistor. The sacrificial gate is removed and a metal replacement gate is formed.

Poly resistor for metal gate integrated circuits

An integrated circuit with a LV transistor and a high performance asymmetric transistor. A power amplifier integrated circuit with a core transistor and a high performance asymmetric transistor. A method of forming an integrated circuit with a core transistor and a high performance asymmetric transistor. A method of forming a power amplifier integrated circuit with an nmos core transistor and an nmos high performance asymmetric transistor, a resistor, and an inductor.

High performance asymmetric cascoded transistor

Electrical device structures constructed in an isolated p-well that is wholly contained within a core n-well. Methods of forming electrical devices within an isolated p-well that is wholly contained within a core n-well using a baseline CMOS process flow.

Method of building compensated isolated P-well devices

An integrated circuit with a core PMOS transistor formed in a first n-well and an isolated DENMOS (iso-DENMOS) transistor formed in a second n-well where the depth and doping of the first and second n-wells are the same. A method of forming an integrated circuit with a core PMOS transistor formed in a first n-well and an iso-DENMOS transistor formed in a second n-well where the depth and doping of the first and second n-wells are the same.

Compensated isolated p-well DENMOS devices

An integrated circuit is disclosed having symmetric and asymmetric MOS transistors of the same polarity, oriented perpendicularly to each other, formed by concurrent halo ion, LDD ion and/or S/D ion implant processes using angled, rotated sub-implants which vary the tilt angle, dose and/or energy between rotations. Implanted halo, LDD and/or S/D source and drain regions formed by angled subimplants may have different extents of overlap with, or lateral separation from, gates of the two types of transistors, producing transistors with two different sets of electrical properties. A process for concurrently fabricating the two types of transistors is also disclosed. Specific embodiments of processes for concurrently forming symmetric and asymmetric transistors are disclosed.

Low cost transistors using gate orientation and optimized implants

Conduction between source and drain or emitter and collector regions is an important characteristic in transistor operation, particularly for lateral bipolar transistors. Accordingly, techniques that can facilitate control over this characteristic can mitigate yield loss by promoting the production of transistors that have an increased likelihood of exhibiting desired operational performance. As disclosed herein, well regions are established in a semiconductor substrate to facilitate, among other things, control over the conduction between the source and drain regions of a lateral bipolar transistor, thus mitigating yield loss and other associated fabrication deficiencies. Importantly, an additional mask is not required in establishing the well regions, thus further mitigating (increased) costs associated with promoting desired device performance.

Lateral bipolar transistor with compensated well regions

A drain extended MOS (DEMOS) transistor with an element of field oxide separating the drain contact from the gate, and a compensation region of opposite polarity in the drain under the gate, is disclosed. The inventive DEMOS may be fabricated in a CMOS IC without adding any process steps. Both n-channel and p-channel versions may be fabricated in CMOS ICs with an n-type buried layer. Furthermore, the inventive transistor may be fabricated in an IC built in an SOI wafer. The width of the compensation region may be varied across multiple instances of the inventive DEMOS transistor to provide a capability for handling multiple signals with different voltage levels in the same IC without adding fabrication steps. The compensation region may be biased by a control voltage to modulate the depletion of the drain extension and provide a capability for handling multiple signal voltage levels in a single transistor.

Growing community of inventors

Dallas, TX, United States of America

Kamel Benaissa