Sony Corporation

Kamada Michiru

Hironobu Narui

Nobukata Okano

Sachio Karino

Kiyotaka Yashima

Yoshinari Kiwaki

A convex part formation method of forming a convex part in parallel with a &#x3c;110&#x3e; direction of a backing on the backing having a {100} face as the top surface thereof, includes: (a) forming a mask layer in parallel with the &#x3c;110&#x3e; direction on the backing; (b) etch the backing so as to form a convex-part upper layer whose sectional shape on a cutting plane corresponding to a {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of &#x3b8;; and (c) further etching the backing so as to form a convex-part lower layer whose sectional shape on the cutting plane corresponding to the {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of &#x3b8;(where &#x3b8;&#x2260;&#x3b8;).

Growing community of inventors

Miyagi, Japan

Kamada Michiru