Ap Infosense Limited

Kam Chiu Lau

Po Shan Chan

Yongwoo Park

Fei Yeung

Qi Lang

Man Wai Cheng

A three-dimensional profiler includes a broadband radiation source. An interferometric system receives the radiation and includes first and second beam splitters, a moving time delay-inducing reflector, and a stationary reflector. The interferometric system creates a time-delayed optical sample radiation source and an optical reference incident radiation source with the first beam splitter. A stationary sample holder receives the optical sample incident radiation. A reference plane receives the optical reference incident radiation. A detector receives an interference signal from reflected or scattered optical sample radiation and reflected or scattered optical reference radiation. A processor extracts an optical path difference between the reference plane and the sample and reconstructs a three-dimensional morphology of the sample.

Growing community of inventors

Rockville, MD, United States of America

Kam Chiu Lau