Asml Holding N.v.

Asml Netherlands B.v.

Kalyan Kumar Mankala

Pradeep Kumar Govil

Roberto B Wiener

Andrew Nelson

Joseph Harry Lyons

Todd R Downey

Tian Gang

Janardan Nath

Alexander Harris Ledbetter

Ozer Unluhisarcikli

Nicholas Stephen Apone

An illumination adjustment apparatus, to adjust a cross slot illumination of a beam in a lithographic apparatus, includes a plurality of fingers to adjust the cross slot illumination to conform to a selected intensity profile. Each finger has a distal edge that includes at least two segments. The two segments form an indentation of the distal edge.

Lithographic apparatus and illumination uniformity correction system

A magnetic shield having non-magnetic gaps provides reduced magnetic cross-talk for a linear motor array in a precision positioning system. Redirecting the leakage flux limits the cross-talk and associated deleterious effects. Such preferred magnetic circuit paths for the leakage are affixed to the moving magnet system of the linear motor. Embodiments of the preferred flux leakage paths are realized by providing a ferromagnetic shield separated by a non-magnetic gap between the permanent magnets and the back-irons. In another embodiment, the ferromagnetic shield separation includes diamagnetic materials.

Linear motor magnetic shield apparatus for lithographic systems

Linear motor magnetic shield apparatus

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Hamden, CT, United States of America

Kalyan Kumar Mankala