Beijing Naura Microelectronics Equipment Co., Ltd.

Kaiyue Cao

Yang Wang

Qiang Zhang

Fan Li

Fei Gao

Zhe Yang

Hao Yang

Zhihao Ren

A water supply control method includes: obtaining water supply time period information that each of the plurality of furnace tubes needs to reserve; according to the water supply time period information that each of the plurality of furnace tubes needs to reserve, updating a reservation queue at a current moment; and according to the water supply time period information in the updated reservation queue, setting the liquid evaporator to be in an available state or an unavailable state for each of the plurality of furnace tubes, such that the liquid evaporator supplies water to only one furnace tube at a time.

Water replenishment control method for semiconductor process device and semiconductor process device

Growing community of inventors

Beijing, China

Kaiyue Cao