Texas Instruments Corporation

Kaiyuan Chen

Tathagata Chatterjee

Joe R Trogolo

Steve Merchant

Henry Litzmann Edwards

The present invention provides a high-voltage junction field effect transistor (JFET), a method of manufacture and an integrated circuit including the same. One embodiment of the high-voltage junction field effect transistor (JFET) () includes a well region () of a first conductive type located within a substrate () and a gate region () of a second conductive type located within the well region (), the gate region () having a length and a width. This embodiment further includes a source region () and a drain region () of the first conductive type located within the substrate () in a spaced apart relation to the gate region () and a doped region () of the second conductive type located in the gate region () and extending along the width of the gate region (). In place of or addition to the doped region (), the high-voltage junction field effect transistor (JFET) () may includes a conductive field plate () located over and extending along the width of the gate region ().

Reliable high-voltage junction field effect transistor and method of manufacturing therefor

Measurements of parameters of MOS transistors, also known as MOSFETs, such as threshold potentials, require accurate estimates of source and drain series resistance. In cases where connections to the MOSFET include significant external series resistance, as occurs in probing transistors that are partially fabricated or deprocessed, accurate estimates of external resistances are also required. This invention comprises a method for estimating series resistances of MOSFETs, including resistances associated with connections to the MOSFET, such as probe contacts. This method is applicable to any MOSFET which can be accessed on source, drain, gate and substrate terminals, and does not require other test structures or special connections, such as Kelvin connections.

Growing community of inventors

Dallas, TX, United States of America

Kaiyuan Chen