Zhejiang University

Kaiwei Wang

Jian Bai

Yongying Yang

Yibing Shen

The present invention discloses a wavelength scanning interferometer and a method for an aspheric surface measurement. The wavelength scanning interferometer comprises a set of tunable lasers () used as a light source, a Twyman-Green interferometer used for generating interference fringes, a translation platform () used for scanning an optical path difference along an optical axis, an image card () used for converting interference data to a digital signal and transmitting the digital signal to a computer (), and a data card () used for synchronizing the actions of a CCD camera () and the translation platform (). Different from the traditional aspheric surface measurement method, the interferometer is capable of measuring a surface with a high aspheric surface degree or a wavefront, and without the need of a zero compensation mirror. In addition, the method does not need a complex and usually expensive multi-dimensional movement platform.

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Hangzhou, China

Kaiwei Wang