Zhejiang University

Kaimin Guan

Bingfeng Ju

Wule Zhu

Anyu Sun

Yuanliu Chen

Li Zheng

Wenhao Zhang

Haoze Zhong

Disclosed are a device and method for detecting a subsurface defect of an optical component. According to the device and method, a spectral confocal technology, a laser scattering technology and a laser-induced ultrasonic technology are combined, excitation laser and detection laser are simultaneously focused to different depths of the optical component through a dispersion lens set, the excitation laser generates a transient thermal expansion effect on a subsurface of the optical component, the detection laser is used for observing and analyzing ultrasonic vibration of the subsurface defect under an action of the thermal expansion effect, and spatial distribution information and scattered spectral information of scattered light at a position of the subsurface defect are acquired by the spectral confocal technology. The device and method are suitable for nondestructive testing of a finished product of an ultra-precise optical component with a strict requirement on the subsurface defect.

Device and method for detecting subsurface defect of optical component

Disclosed are methods and devices for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of a thin-walled rotating body. According to the invention, a chromatic confocal senor head is driven by a bottom rotary table, a main measuring head rotary table and a linear motion shaft mover to perform copy scanning along a surface of a thin-walled shell-type rotating body, so that the detection of the surface shapes and thickness distribution of the inner and outer walls of the thin-walled shell-type rotating body can be realized at the same time. By the method, mechanical interference caused by arranging a measuring head in the thin-walled shell-type rotating body can be avoided, and coordinate consistency of surface shape measurement data and thickness distribution data of the inner and outer walls in a three-dimensional space can be ensured, thus ensuring the overall measurement precision; and meanwhile.

Method and device for simultaneously detecting surface shapes and thickness distribution of inner and outer walls of thin-wall rotating body

Growing community of inventors

Hangzhou, China

Kaimin Guan