Beihang University

Langfang Zhichi Power Technology Ltd.

Kaibo Lei

Wenbin Wang

Zhi Tao

Xiao Lin Zhang

Xiao Zhang

Weidong Fang

Xiaoda Cao

Yanxin Zhai

Kaiyun Zhu

Haiwang Li

Tiantong Xu

Yang Feng

Wensong Xiao

Zhiyang Wang

Yuying Wu

Hengyi Wang

Murun Li

Di An

Haonan Lu

Chunhui Yang

Disclosed is an ultra-micro voice coil motor based on Micro-Electro-Mechanical System (MEMS) three-dimensional coil. The ultra-micro voice coil motor based on MEMS three-dimensional coil comprises a yoke, where an accommodating cavity is formed in the yoke, and a tongue is arranged in the accommodating cavity of the yoke; and two permanent magnets symmetrically arranged at a top and a bottom of the accommodating cavity; the three-dimensional coil is provided with an iron core slot, and the tongue of the yoke passes through the iron core slot to be in clearance fit with the three-dimensional coil; one end of the yoke is provided with a baffle, same poles of two magnets face each other, and a stator of the voice coil motor is the three-dimensional coil or the yoke and the permanent magnets.

Ultra-micro voice coil motor based on micro-electro-mechanical system three-dimensional coil

Provided are a pressure difference sensor, and a manufacturing method and an application thereof. A manner of bonding three layers of wafers is adopted, and the sensor includes an upper structure, an intermediate structure and a lower structure. Each of the upper structure and the intermediate structure is manufactured by a silicon-on-insulator (SOI) wafer, the lower structure is manufactured by patterned doped intrinsic silicon; and a lead pad of each of the upper electrode, and the intermediate electrode and the lower electrode is located on a corresponding one of three-stepped steps at a side of the pressure difference sensor. Annular through holes are formed around the upper electrode and the lower electrode. A constant capacitance of a capacitance signal outputted by an upper capacitor of the sensor by extending an electric field line path of the constant capacitor part.

Capacitive pressure difference sensor with improved bonding and manufacturing method

Growing community of inventors

Beijing, China

Kaibo Lei