Taiwan Semiconductor Manufacturing Comp. Ltd.

Global Advanced Packaging Technology H.k. Limited

Kai Wu

Chih-Ming Ke

Yen-Liang Chen

Kai-Hsiung Chen

Hung-Chih Hsieh

Po-Chung Cheng

Wan Hua Wu

A method for performing DBO measurements utilizing apertures having a single pole includes using a first aperture plate to measure X-axis diffraction of a composite grating. In some embodiments, the first aperture plate has a first pair of radiation-transmitting regions disposed along a first diametrical axis and on opposite sides of an optical axis that is aligned with a center of the first aperture plate. Thereafter, in some embodiments, a second aperture plate, which is complementary to the first aperture plate, is used to measure Y-axis diffraction of the composite grating. By way of example, the second aperture plate has a second pair of radiation-transmitting regions disposed along a second diametrical axis and on opposite sides of the optical axis. In some cases, the second diametrical axis is substantially perpendicular to the first diametrical axis.

Aperture design and methods thereof

A spectroscopic overlay metrology system and corresponding spectroscopic overlay metrology methods are disclosed herein for improving overly measurement accuracy, optimizing overlay recipes, and/or minimizing (or eliminating) asymmetry-induced overly error from overlay measurements. An exemplary method includes generating a diffraction spectrum by an overlay target from incident radiation having more than one wavelength. The diffraction spectrum includes a plurality of positive ordered diffracted beams and a plurality of negative ordered diffracted beams that are separated by wavelength, such that the diffraction spectrum includes more than one wavelength of a positive order and a negative order. The method further includes collecting intensity information associated with the diffraction spectrum generated by the overlay target from the incident radiation, and generating overlay information from the collected intensity information, where the overlay information includes contributions from asymmetry-induced overlay error. In some implementations, the method includes optimizing an overlay recipe based on the generated overlay information.

Spectroscopic overlay metrology

The invention provides a multiple stacked-chip packaging structure, including: at least one lower layer chip located on a substrate, wherein a plurality of wires are electrically connected to the bonding pads on the lower layer chip and to the substrate; at least one carrier cap provided on the lower layer chip to provide an accommodating space to the bonding pads and the wires on the lower layer chip; at least one upper layer chip provided on the carrier cap, wherein a plurality of wires are electrically connected to the bonding pads on the upper layer chip and to the substrate; and finally, a Molding Compound used to wrap up the foregoing components. The advantages of the invention are that the invention is not limited by the layout patterns of bonding pads on the chip, that the needed chips can be placed on either the upper layer or the lower layer structure according to the requirement, and that the degree of coplanar can be ensured when performing wire bonding on the upper layer chip so as to facilitate the wire bonding process.

Multiple stacked-chip packaging structure

Growing community of inventors

Hsinchu, Taiwan

Kai Wu