Taiwan Semiconductor Manufacturing Comp. Ltd.

Kai-Wen Wu

Cheng-Yi Huang

Chin-Shen Hsieh

Chun-Ta Chen

Ming-Hsien Tsai

Chung-Wei Fang

Yao-Fong Dai

Chih-Tung Lo

In an embodiment, an apparatus comprising: a heater configured to heat a wafer located on a wafer staging area of the heater, the heater comprising a heater shaft extending below the wafer staging area; and a heater lift assembly comprising: a lift shaft configured to move the heater shaft in a vertical direction; a clamp that connects the heater shaft to the lift shaft; and a damper disposed on top of the clamp.

Heater lift assembly spring damper

An electromagnetic detection device is provided. The electromagnetic detection device includes an induction coil, a converter, and a controller. The induction coil is utilized to sense an RF signal and generate a sensing RF signal by electromagnetic induction of the induction coil which is proportional to the RF signal. The RF signal is transmitted to a shower head to perform a semiconductor process on a wafer for manufacturing an IC in association with the RF signal. The converter is utilized to convert the sensing RF signal into a DC signal. The controller is utilized to determine whether the semiconductor process is normal or abnormal according to the DC signal during the semiconductor process. The semiconductor process will be terminated when the semiconductor process is determined as abnormal.

Electromagnetic detection device and semiconductor manufacturing system

Growing community of inventors

Hsinchu, Taiwan

Kai-Wen Wu