Carl-zeiss-smt Ag

Kai-Uwe Berroth

Markus Hauf

Jochen Weber

Erich Merz

Ole Fluegge

Cornelia Buehler

In some embodiments, the disclosure relates to an optical assembly that includes an optical element and a structure element. A gap runs between the optical element and the structure element. A sealing element may be present to seal the gap. At least one liquid layer may be arranged between the structure element and/or the optical element, and the sealing element so that a relative displacement of the sealing element with respect to the structure element and/or the optical element is possible in the direction of the layer plane.

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Heldenfingen, Germany

Kai-Uwe Berroth