Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Kai-Marcel Muckensturm

Dirk Weiler

Frank Hochschulz

A radiation detector includes a substrate and a membrane suspended above the substrate by spacers, wherein the spacers electrically contact a radiation sensor formed in the membrane and thermally insulate the membrane from the substrate.

Radiation detector and method for manufacturing a radiation detector

A radiation detector with a substrate and a membrane, which is suspended above the substrate by a spacer is described, wherein the spacer thermally insulates a radiation sensor, which is formed in the membrane, from the substrate. Further, the spacer includes a first layer, which is electrically conducting and contacts a first pole of the radiation sensor and of the substrate, and a second layer, which is electrically conducting and electrically insulated from the first electrically conductive layer and contacts a second pole of the radiation sensor and of the substrate, wherein the second pole differs in polarity from the first pole.

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Duisburg, Germany

Kai-Marcel Muckensturm