Air Products and Chemicals, Inc.

Versum Materials Us, LLC

Kai Kang

Sergei Vladimirovich Ivanov

Charles Michael Birtcher

Xiaoyi He

Thomas Andrew Steidl

Wade Hampton Bailey, Iii

Eugene S Genkin

James Patrick Nehlsen

An apparatus and process for oxidant formation can be configured to facilitate improved mixing of for formation of an oxidant. Embodiments can be configured so conduits having a relatively large aspect ratio (e.g., 1.5 to 5 or 1.5 to over 5) can be utilized for improved gas mixing even in situations in which the carrier gas is at a relatively low pressure. Embodiments can also facilitate low nitrogen oxide formation combustion. Some embodiments can additionally provide improved carbon capture.

Apparatus and process for oxidant formation

Described herein are delivery containers, systems and methods using same for providing improvements to precursor utilization in the containers for deposition process, as well as the cleaning and refilling of the containers. The containers are designed with structures which allow a carrier gas to be delivered from a flow distributor. The flow distributor comprises a plurality of small openings (jets) through which the carrier gas enters the precursor chamber and impinges upon the surface of the chemical precursors to produce a vapor.

Delivery container with flow distributor

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Allentown, PA, United States of America

Kai Kang