Infineon Technologies Ag

Kai Esmark

Harald Gossner

Martin Wendel

Cornelius Christian Russ

Jens Schneider

Martin Streibl

Krzysztof Domanski

Wolfgang Stadler

Christian Cornelius Russ

Ulrich Glaser

Philipp Riess

Gunther Mackh

David Alvarez

Markus Eckinger

Thomas Schafbauer

Richard Owen

Franz Zängl

Donald Dibra

Yiqun Cao

Karl-Heinz Mueller

Marin Streibl

Silke Bargstädt-Franke

The described techniques address issues associated with electrostatic discharge (ESD) protection for multi-die integrated circuits (ICs). The techniques include the use of two or more semiconductor dies within a multi-die IC, which may include a first semiconductor die without ESD protection but with full ESD exposure. The first semiconductor receives ESD protection via a second semiconductor die that is integrated as part of the same package with the first semiconductor die. The second semiconductor die may be electrically more remote from ESD-exposed pins compared to the first semiconductor die. The first semiconductor die may include integrated passive devices. The second semiconductor die enables ESD protection for both semiconductor dies in the same integrated IC package.

ESD protection for multi-die integrated circuits (ICs) including integrated passive devices

An embodiment of a silicon controlled rectifier (SCR) includes a semiconductor body, an active device region, and a device isolation region configured to electrically insulate the active device region from neighboring active device regions. First SCR regions and a second SCR region of a first conductivity type are in the active device region. A first pn-junction or Schottky junction is formed at an interface between the first SCR regions and the second SCR region. A first plurality of the first SCR regions and sub-regions of the second SCR region are alternately arranged and directly adjoin one another. A second pn-junction is formed at an interface between the second SCR region and a third SCR region of a second conductivity type. A third pn-junction is formed at an interface between the third SCR region and a fourth SCR region of the first conductivity type.

Silicon controlled rectifier and manufacturing method therefor

The invention relates to an avalanche diode that can be employed as an ESD protection device. An avalanche ignition region is formed at the p-n junction of the diode and includes an enhanced defect concentration level to provide rapid onset of avalanche current. The avalanche ignition region is preferably formed wider than the diode depletion zone, and is preferably created by placement, preferably by ion implantation, of an atomic specie different from that of the principal device structure. The doping concentration of the placed atomic specie should be sufficiently high to ensure substantially immediate onset of avalanche current when the diode breakdown voltage is exceeded. The new atomic specie preferably comprises argon or nitrogen, but other atomic species can be employed. However, other means of increasing a defect concentration level in the diode depletion zone, such as an altered annealing program, are also contemplated.

Avalanche diode having an enhanced defect concentration level and method of making the same

An embodiment of an integrated circuit includes a minimum lateral dimension of a semiconductor well at a first surface of a semiconductor body. The integrated circuit further includes a first lateral DMOSFET having a load path electrically coupled to a load pin. The first lateral DMOSFET is configured to control a load current through a load element electrically coupled to the load pin. A minimum lateral dimension of a drain region of the first lateral DMOSFET at the first surface of the semiconductor body is more than 50% greater than the minimum lateral dimension.

Integrated circuit including lateral insulated gate field effect transistor

A semiconductor device includes an SCR ESD device region disposed within a semiconductor body, and a plurality of first device regions of the first conductivity type disposed on a second device region of the second conductivity type, where the second conductivity type is opposite the first conductivity type. Also included is a plurality of third device regions having a sub-region of the first conductivity type and a sub-region of the second conductivity type disposed on the second device region. The first regions and second regions are distributed such that the third regions are not directly adjacent to each other. A fourth device region of the first conductivity type adjacent to the second device region and a fifth device region of the second conductivity type disposed within the fourth device region are also included.

Semiconductor ESD device and method of making same

Method of forming a semiconductor device including a silicon controlled rectifier

Electrostatic discharge devices and methods of forming thereof are disclosed. In one embodiment, a semiconductor device includes an electrostatic discharge (ESD) device region disposed within a semiconductor body. A first ESD device is disposed in a first region of the ESD device region, and a second ESD device disposed in a second region of the ESD device region. The second region is separated from the first region by a first trench.

Methods of forming electrostatic discharge devices

Electrostatic discharge devices

Devices and circuits related to Electrostatic discharge (ESD) and Electromagnetic compatibility (EMC) are herein described. An ESD protection device is incorporated into a transistor in order to protect the gate of the transistor from excessive current loads related to ESD or EMC events. In an implementation, a device includes a first diode and a second diode that are electrically connected via their respective cathodes. The breakdown voltage of the first diode is lower than the breakdown voltage of the second diode in order to divert excessive current through the second diode.

ESD and EMC optimized HV-MOS transistor

An integrated circuit arrangement includes a Shockley diode or a thyristor. An inner region of the diode or of the thyristor is completely or partially shielded during the implantation of a p-type well. This gives rise to a Shockley diode or a thyristor having improved electrical properties, in particular with regard to the use as an ESD protection element.

Integrated circuit arrangement with shockley diode or thyristor and method for production and use of a thyristor

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Neuried, Germany

Kai Esmark