Asml Netherlands B.v.

Cymer, Inc.

Lumentum Operations LLC

University of Michigan

Kai-Chung Hou

Richard L Sandstrom

William N Partlo

Igor Vladimirovich Fomenkov

Daniel J W Brown

Martin H Muendel

Robert Jay Rafac

Jeremy Weston

Dahv Kliner

Almantas Galvanauskas

Daniel John William Brown

Daniel Brown

A target material is provided at a target location, the target material including a material that emits extreme ultraviolet light when converted to plasma, and the target material extending in a first extent along a first direction and in a second extent along a second direction; an amplified light beam is directed along a direction of propagation toward the target location; and the amplified light beam is focused in a focal plane, where the target location is outside of the focal plane and an interaction between the amplified light beam and the target material converts at least part of the target material to plasma that emits EUV light.

Extreme ultraviolet light source

A cladding stripper includes a plurality of transversal notches or grooves in the outer surface of an exposed inner cladding of a double clad optical fiber. Position and orientation of the notches can be selected to even out cladding light release along the cladding light stripper, enabling more even temperature distributions due to released cladding light. The notches on the optical fiber can be made with a laser ablation system.

Cladding light stripper and method of manufacturing

A device is described herein which may comprise an optical amplifier having a gain band including wavelengths &#x3bb;and &#x3bb;, with &#x3bb;&#x2260;&#x3bb;; a pre-pulse seed laser having a tuning module for tuning a pre-pulse output to wavelength &#x3bb;; a main pulse seed laser generating a laser output having wavelength, &#x3bb;; and a beam combiner for directing the pre-pulse output and the main pulse output on a common path through the optical amplifier.

Master oscillator&#x2014;power amplifier drive laser with pre-pulse for EUV light source

Master oscillator-power amplifier drive laser with pre-pulse for EUV light source

As disclosed herein, in a first aspect, a device may comprise: an oscillator producing a light output on a beam path; a target material for interaction with light on the beam path at an irradiation site; a beam delay on the beam path the beam delay having a beam folding optical arrangement; and a switch positioned along the beam path and interposed between the oscillator and the beam delay; the switch closable to divert at least a portion of light on the beam path from the beam path, the switch having close time, tand the beam path having a length, L, along the path from the switch to the irradiation site; with t&#x3c;cL, where c is the speed of light on the path, to protect the oscillator.

Oscillator-amplifier drive laser with seed protection for an EUV light source

A beam combining system suitable of pulsed fiber laser applications is able to produce non-spatial-dispersive beams using an highly efficient filter, such as a multilayer dielectric filter, in transmission and reflection configurations. The techniques therefore can overcome constraints on laser line-width and beam width and allow for more stable systems for high peak power pulsed laser energy, such as may be used in extreme ultraviolet lithography and other applications.

Spatial-dispersion-free spectral combining of pulsed high peak power fiber laser beams

Growing community of inventors

San Jose, CA, United States of America

Kai-Chung Hou