Industrial Technology Research Institute

Kai-Cheng Chang

Pei-Fang Liang

Chia-Yuan Chang

Ming-Hsiu Hsu

Yi-Ru Chen

Guang-Chyeng Fang

Wen-Pin Hsieh

Guang-Chyeng Fan

Yi-Chin Tsai

Pin-Cha Hsu

A surface acoustic wave (SAW) bio-chip is designed with signal processing circuits. The chip can achieve precise measurements or detection quantitatively via the difference between the experiment-control mode, and followed by amplification and filtering of the signal processing circuits. By changing the designs of the substrate, quantitative detection toward different analyses can be achievable.

Surface acoustic wave bio-chip

The present invention is related to a flexible substrate structure for microneedle arrays and its manufacturing method, whose structure mainly comprising: tapered shape objects and flexible substrate. Wherein, structure of the tapered shape object is composed of a tip, sidewalls, and a base. Meanwhile, the flexible substrate winds tightly around sidewalls of tapered shape objects and is set up on, yet covers the base surface of tapered shape object which faces the tip of tapered shape object. Because the structure applies a flexible substrate along with tapered shape objects, hence, the fit-to-body capability is increased and allows thereof more appropriate for backside drug delivery, as well as sufficiently bring the characteristic of large-area manufacturing into full play.

Flexible substrate structure for microneedle arrays and its manufacturing method

A plane type electric precipitator includes an electrode plate of plane shape, made of electricity-conducting material; a collecting plate, parallel to the electrode plate and made of electricity-conducting material; a plurality of electrode units, placed on the electrode plate and having tips; wherein direct electric voltage is applied between the electrode plate and the collecting plate, so that air passing through is exposed to high electric fields close to the tips of the electrode units, ionizing suspended particles and trapping ionized particles at the collecting plate, so that an air-cleaning effect results.

Planar electric precipitator

An adjustable eddy electrostatic precipitator, including a main body, an electrode array, an adjustable opening and a precipitating device. The main body has an inner space with an air guiding plate of helical shape, an entrance for air and an exit for air. The electrode array is placed close to the entrance, ionizing air as well as particles floating therein. The adjustable opening is located at the exit, having an adjustable aperture. The precipitating device is connected with a bias high voltage for adsorbing ionized particles. Air entering the main body through the entrance is ionized, ionizing particles floating therein. Ionized particles are driven towards a single zone and are collected depending on size and charge in an adjustable manner.

Adjustable eddy electrostatic precipitator

An inertia device is constructed by both suspension structure and micro-electroplating structure. The suspension structure may be manufactured by surface micromachining technique of sacrificial layer process or bulk micromachining technique incorporating with thin film process. One side of the suspension structure is arranged firmly to a supporting piece, so that another side of the suspension structure is in a suspension state. The suspension side of the suspension structure is made as micro-electroplating structure through the micro-electroplating process and functions as inertia mass for an inertia sensor. The size of the micro-electroplating structure may be changed through the micro-electroplating process, such that the inertia sensor may be adapted for sensing in different levels. Furthermore, a microstructure of high aspect ratio may be achieved by taking the advantage of a metal during the selection of a processing material, such that the objective for lateral sensing or driving signal may be fulfilled.

Inertia sensor

The invention is to provide a vibratory double-axially sensing micro-gyroscope, which includes a base, on center of which a supporting hub is arranged, and plural suspending arms are extended outwardly with equal altitude and in radial direction from the supporting hub and, at the outside end of the suspending arm, a platform is formed, and a capacitance sensing electrode or a static-electricity driving electrode is plated respectively at each side of the platform top, below which a static-electricity driving electrode or a capacitance sensing electrode is arranged; take a preferred embodiment of the present invention for example, if the capacitance sensing electrode is arranged at top of the platform and the static-electricity driving electrode is arranged below the platform, then the suspending arm and the platform will vibrate vertically by the attraction of the static-electricity when applying driving voltage, and the vibratory phase difference between two adjacent suspending arms and the platform is 180 degrees; when the gyroscope is rotated horizontally, the suspending arm and the platform will generate horizontal displacement caused by Coriolis force and, by measuring the change of capacitance value, the magnitude of the angular velocity of vibration is obtained; since its structure has symmetrical property, so it has sensing ability in both X or Y axes and, because it has superior stability and is able to resist environment noise and vibration, its sensing capability is enhanced and, since its machining method is simple, so it is adapted for mass production for having lower manufacturing cost.

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Taipei, Taiwan

Kai-Cheng Chang