Gebrüder Decker Gmbh & Co. Kg

Jürgen Seeberger

Frank Werfel

A device () for treating objects, in particular silicon wafers (), with a fluid (), comprising a container () that holds the fluid (); a rotatable carrying arrangement () for accommodation of the objects to be treated, which is disposed at least partially in the container (); and a rotatably drivable shaft, which is run on at least one bearing () and joined to the carrying arrangement (); with the bearing () including a first bearing member (), which is joined to the shaft, and a second bearing member (), which adjoins the first bearing member () and contains superconductive material; with the first bearing member () being kept spaced from the second bearing member () by magnetic forces.

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Passau, Germany

Jürgen Seeberger