Jpk Instruments Ag

Jörn Kamps

Gunnar Sommer

The invention relates to an apparatus and a method for examining a specimen by means of probe microscopy, in particular scanning probe microscopy. The apparatus comprises a probe microscope device which has a specimen holder for holding a specimen to be examined, a measurement probe and a displacement unit which is configured to displace the specimen holder and the measurement probe relative to one another for an examination of the specimen by means of probe microscopy, and comprises a condenser illumination and also an optical system which is arranged downstream of the condenser illumination and is configured to project condenser light, which is emitted by the condenser illumination in a condenser light path, into the region of the specimen holder for optical microscopy of the specimen to be examined, while at least partially maintaining condenser light parameters with which the condenser light is emitted by the condenser illumination.

Apparatus and method for examining a specimen by means of probe microscopy

The invention relates to a method of and an apparatus for measuring a specimen by means of a scanning probe microscope, especially a scanning force microscope, wherein a probe () is displaced with respect to a specimen () by means of lateral and vertical shifting units () to measure the specimen (); measuring light rays () are generated by means of a light source () and directed to a reflection means () disposed on the probe; the measuring light rays () are reflected at the reflection means (), whereby reflected measuring light rays () are formed; and the reflected measuring light rays () are directed by means of a correction lens () to a detector surface () of a detector means () to generate a measurement signal, the correction lens () being positioned at a distance from the detector surface () substantially corresponding to a focal length of the correction lens ().

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Berlin, Germany

Jörn Kamps