International Business Machines Corporation

Jörg Georg Appinger

Martin Eckert

Otto Andreas Torreiter

Quintino Lorenzo Trianni

The invention relates to a device for positioning a semiconductor die in a wafer prober, the device comprising a carrier plate and a clamp on a front surface of the carrier plate, the dimensions of the carrier plate matching a standard geometry required by the wafer prober for receiving a semiconductor wafer to be probed by the wafer prober, the clamp being reversibly movable against a force of an elastic element between an open position and a closed position, the clamp being adapted for fixing the die on the carrier plate in the closed position and for releasing the die in the open position.

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Aidlingen, Germany

Jörg Georg Appinger