Gudeng Precision Industrial Co., Ltd.

Taiwan Semiconductor Manufacturing Comp. Ltd.

Jyun-Ming Lyu

Ming-Chien Chiu

Chia-Ho Chuang

Kuo-Hua Lee

En-Nien Shen

Tzu Ang Chiang

Yi-Feng Huang

Tsung-Yi Lin

Xin-Yuan Huang

The invention discloses a substrate container including a shell and a cover member. The shell defines an accommodation space, and has a bottom and at least one exhaust hole formed on the bottom, wherein the exhaust hole is adjacent to an opening of the shell. The cover member is mounted to the bottom of the shell, and the cover member and the bottom of the shell define a negative pressure cavity above and communicating with the at least one exhaust hole. An elongated exhaust hole is defined above the negative pressure cavity, and communicates with the negative pressure cavity and the accommodation space. A gas in the accommodation space is exhausted sequentially from the elongated exhaust hole, the negative pressure cavity and the at least one exhaust hole.

Substrate container with built-in negative pressure cavity

A substrate container includes a container body having a storage space and an opening in communication with the storage, a door body disposed at the opening, a limiter disposed on the door body and facing the opening, a supporter disposed on one side of the storage space, and at least two elastic buffer elements tightly disposed between the door body and the limiter and between the supporter and the container body, respectively. A door assembly of a substrate container, a support assembly of a substrate container and an elastic buffer element used in a substrate container are further provided. The elastic buffer element is applied between any two rigid elements in the substrate container to provide a buffer force and an appropriate frictional force, so as to alleviate the problems of impact and dust generated between the rigid elements.

Substrate container and its door assembly, support assembly, and elastic buffer element

A door device includes a door body and a substrate retaining assembly. The substrate retaining assembly is disposed on a side of the door body. The substrate retaining assembly includes a retaining body and a plurality of retaining members. The retaining members are disposed on the retaining body and arranged at intervals. Each of the retaining members includes two elastic arms and a clamping structure. The clamping structure includes a clamping body, a clamping groove, and at least one relief portion. The clamping body is connected between the two elastic arms. The clamping groove is located on the clamping body and is communicated with adjacent ends of the elastic arms. The relief portion and the clamping groove are communicated to each other.

Substrate retaining assembly and door device

Growing community of inventors

Taipei, Taiwan

Jyun-Ming Lyu