Asm IP Holding B.v.

Juul Keijser

Theodorus G M Oosterlaken

Herbert Terhorst

Lucian C Jdira

Chris G M De Ridder

Klaas P Boonstra

Bartholomeus Hans Louis Lindeboom

An apparatus (), including a gas recirculation circuit comprising a mini environment chamber (), a gas pump (), a filter assembly () which are connected by a recirculation channel (). The apparatus additionally includes an air supply conduit () for supplying air to the gas recirculation circuit and having an air supply conduit inlet () which opens into the ambient air and an air supply conduit outlet () which opens in the recirculation circuit. In use, a mini environment chamber pressure (P) is maintained higher than the ambient pressure (P). The gas recirculation channel () includes a substantially frictionless recirculation restriction embodied as a throat (). At downstream end of the throat which forms the narrow part of the throat, in use, the static pressure is below the ambient pressure. The air supply conduit outlet opens at the downstream end () of the throat.

Apparatus including a clean mini environment

An assembly of a liner and a flange for a vertical furnace for processing substrates is provided. The liner being configured to extend in the interior of a process tube of the vertical furnace, and the flange is configured to at least partially close a liner opening. The liner comprising a substantially cylindrical wall delimited by the liner opening at a lower end and closed at a higher end and being substantially closed for gases above the liner opening and defining an inner space. The flange comprising:

Assembly of a liner and a flange for a vertical furnace as well as the liner and the vertical furnace

Growing community of inventors

Almere, Netherlands

Juul Keijser