Applied Materials, Inc.

Nvidia Corporation

Justin Wang

Dmitry Lubomirsky

Vijay D Parkhe

Mehmet Tugrul Samir

Dz-Ching Ju

Onkara Swamy Kora Siddaramaiah

Kirby H Floyd

Implementations described herein provide a substrate support assembly which enables temperature uniformity across a workpiece surface. In one embodiment, a substrate support assembly is provided that includes a body. The body made from ceramic. The body having a workpiece support surface and a mounting surface. The workpiece support surface and the bonding chuck body surface having a flatness of less than 10 microns. A first heater is disposed on the bottom surface outside the body. A bonding layer is disposed over the first heater, wherein the bonding layer is electrically insulating and a cooling base having a body made from a metal. The cooling body having an upper cooling body surface and a lower cooling body surface wherein the upper cooling body surface is less than about 10 microns flat.

Extreme uniformity heated substrate support assembly

Apparatuses, systems, and techniques to identify instructions for advanced execution. In at least one embodiment, a processor performs one or more instructions that have been identified by a compiler to be speculatively performed in parallel.

Techniques for parallel execution

Growing community of inventors

Santa Clara, CA, United States of America

Justin Wang