Applied Materials, Inc.

Justin Lowe

Jeffrey D Chinn

Keith D Relleen

Robert John Clifford Mitchell

An ion implanter having a scanning arm which can pass vertically through ion beam, having a wafer loading/unloading position above the beam. The scanning arm also has capability for movement of wafer in its own plane when tilted relative to the beam, and there is also disclosure of a double scanning arm arrangement generating to/from a single wafer loader/unloader.

Ion implanter

A surface particle sampling head having a rotatable probe The sampling head contains a handle, a probe and a joint connecting the handle to the probe such that the probe rotates relative to the handle. Preferably, the rotatable joint is a universal joint that enables the probe to gimbal relative to the handle. The probe further contains a manifold having a releasably attached face plate.

Growing community of inventors

San Francisco, CA, United States of America

Justin Lowe