Carl Zeiss Ag

Jurgen Werner

Edward Gumbrell

Michael Spieweck

A system and a method for determining a position of two objects relative to each other is suggested, comprising: a sourceof coherent radiation, a beam guidance for providing a measuring branchfor a measuring beam, which has an optical path length dependent on the position of the two objects, a radiation intensity sensorfor measuring an intensity of an interfering superposition of radiation, which include radiation at least after passing through the measuring branch, and a calculatorwhich responds to a measuring signal from the radiation intensity sensor, in order to detect optical path lengths of the measuring branchand therefrom to detect the position of the two objects relative to each other, wherein the measuring branchincludes: at least one emitter fixedly mountable on a first of the two objects for emitting radiation supplied to the measuring branchin a space between the two objects, at least three retroreflectorsmountable on the second one of the two objects, such that they are arranged at fixed distances relative to each other, and at least one receivermountable on the first of the two objects for receiving radiation reflected back by the retroreflectorsand for supplying the received radiation to the radiation intensity sensor, wherein the emitteremits the radiation into such an angular area that the at least three retroreflectorsare contained therein.

System and method for determining a position or/and orientation of two objects relative to each other as well as beam guiding arrangement, interferometer arrangement and device for changing an optical path length for use in such a system and method

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Aalen, Germany

Jurgen Werner