Asml Netherlands B.v.

Jurgen Van Soest

Marco Jan-Jaco Wieland

Jan-Gerard Cornelis Van Der Toorn

Yixiang Wang

Vincent Sylvester Kuiper

Allard Eelco Kooiker

Laura Dinu-Gürtler

Ying Luo

Eric Petrus Hogervorst

Shibing Liu

Bohang Zhu

Jeroen Gertruda Antonius Huinck

Han Willem Hendrik Severt

Arno Maria Wellink

Chia-Yao Chen

Michael Johannes Christiaan Ronde

Michaël Johannes Christiaan Ronde

The disclosed embodiments relate to a charged particle source module for generating and emitting a charged particle beam, such as an electron beam, comprising: a frame including a first frame part, a second frame part, and one or more rigid support members which are arranged between said first frame part and said second frame part; a charged particle source arrangement for generating a charged particle beam, such as an electron beam, wherein said charged particle source arrangement, such as an electron source, is arranged at said second frame part; and a power connecting assembly arranged at said first frame part, wherein said charged particle source arrangement is electrically connected to said connecting assembly via electrical wiring.

Charged particle source module

Disclosed is an object table for holding an object, comprising: an electrostatic clamp arranged to clamp the object on the object table; a neutralizer arranged to neutralize a residual charge of the electrostatic clamp; a control unit arranged to control the neutralizer, wherein the residual charge is an electrostatic charge present on the electrostatic clamp when no voltage is applied to the electrostatic clamp.

Object table comprising an electrostatic clamp

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Delft, Netherlands

Jurgen Van Soest