Carl-zeiss-stiftung

Jurgen Schweizer

Joachim Luber

Bruno Schweizer

Hartmut Gartner

Arvids Mackevics

Horst Stacklies

Martin Pelzer

Heinz Jakubowski

Steffen Pommerening

Reinhard Ludewig

Albrecht Geist

Annette Reiss

An optical arrangement includes several separate individual beams that pass through a common focus before a first segmented mirror field and, after reflection by respective separate mirrors of the segmented mirror field, the individual beams are imaged by an objective on one or more workpieces. A second segmented mirror field is arranged between the first segmented mirror field and the object, or at least one beam splitter is arranged after the focus and deflects the individual beams onto at least one segmented mirror field, by which they are reflected back at least nearly identically on themselves.

Optical arrangement for several individual beams with a segmented mirror

The invention is directed to a zoom device which is built up of several lenses wherein at least one parallel entry beam is changed with respect to its diameter. The exit beam has the same optical axis as the entry beam. The zoom device of the invention is assembled from several zoom systems. The optical axes of the lenses of the different zoom systems are arranged so as to be mutually parallel or at least in a fixed spatial relationship so that in a beam made up of many individual beams the defined diameter remains constant because of the axes of the outer individual beams.

Zoom device

The invention relates to a process for providing a bearing of a tilting device, which makes possible a tilt around at least one axis, with a tilting member, a base member, and a bearing situated between these two members. The center of gravity of the tilting member is situated at the pivot point of the bearing. A first portion of the tilting member is arranged above the pivot point, a second portion of the tilting member is arranged below the pivot point, and the weight of the first portion of the tilting member and the weight of the second portion of the tilting member correspond to each other.

Process for providing a bearing of a tilting device and tilting device

A method and apparatus for irradiating a surface of a workpiece utilizing several discrete component beams. The irradiation exposes a photosensitive layer on a surface of a workpiece to be processed. A deflecting device is provided having a plurality of elements assigned to corresponding ones of the component beams. Each component beam is directed individually or in combination with other component beams by the deflecting device. In this way, different points and zones on the surface of the workpiece to be processed can be irradiated simultaneously.

Method and apparatus of irradiating a surface of a workpiece with a

A stand is provided for mounting various loads and is balanced at least partially automatically. The stand includes a plurality of interconnected elements defining one or more axes about which the stand is movable. An open-loop or closed-loop control circuit is provided for at least one of the axes and detects the unbalanced state about the one axis. The control circuit allows a torque compensating device to operate on the one axis until a state of equilibrium is obtained.

Stand for mounting various loads

The invention relates to a tilt mirror arrangement which has at least one tilt mirror, a base and at least one mirror bearing having at least a virtually fixed pivot point between the tilt mirror and the base. The mirror surface is characterized by a length of less than 40 mm and the size of the entire arrangement of the tilt mirror, bearing and housing is arranged below the mirror surface so that the arrangement does not extend beyond the projection of the mirror plane or extends only insignificantly when the mirror tilts.

Tilt mirror arrangement

A motorized stand for positioning medical therapeutic or diagnostic instruments is mechanically coarsely balanced by weights. A defined positioning of the medical instrument is determined by means of several drive units with integrated angle transducers. Operating safety is additionally ensured, in the event of failure of a drive unit, by the use of two angle transducers per drive unit. One angle transducer is coupled to the drive motor of each drive unit. The other angle transducer is independent of the drive motor.

Growing community of inventors

Westerhofen, Germany

Jurgen Schweizer